Semiconductor device

ABSTRACT

To provide a semiconductor device characterized in that lands for mounting thereon solder balls placed in an inner area of a chip mounting area have an NSMD structure. This means that lands for mounting thereon solder balls placed in an area of the back surface of a through-hole wiring board overlapping with a chip mounting area in a plan view have an NSMD structure. According to the invention, a semiconductor device to be mounted on a mounting substrate with balls has improved reliability.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Divisional Application of U.S. Ser. No. 13/872,012filed Apr. 26, 2013, which claims priority to Japanese PatentApplication No. 2012-109309 filed on May 11, 2012. The subject matter ofeach is incorporated herein by reference in entirety.

BACKGROUND

The present invention relates to a semiconductor device. The inventionrelates to, for example, a technology effective when applied to atechnology of mounting, on a mounting substrate, a wiring board havingthereon a semiconductor chip via a ball to be coupled to a land placedon the back surface of the wiring board.

Japanese Patent Laid-Open No. 2007-81374 (Patent Document 1) describes atechnology in which a plurality of bonding pads formed on a substrateare comprised of a plurality of NSMD (Non-Solder Mask Defined) bondingpads and a plurality of SMD (Solder Mask Defined) bonding padsalternately arranged on one surface of the substrate.

Japanese Patent Laid-Open No. 2010-245455 (Patent Document 2) describesthe following technology. Described specifically, among two or morepads, a pad formed on a corner portion is covered, at a first peripheraledge on the side of the corner portion far from the center of the basematerial of the pad, with a solder resist. On the other hand, a secondperipheral edge on the side closer to the center of the base materialthan the first periphery is exposed from the solder resist.

According to Japanese Patent Laid-Open No. 2009-21366 (Patent Document3), a plurality of first electrode pads is placed in an area of the backsurface of a wiring board overlapping with a semiconductor chip in aplan view and a plurality of second electrode pads is placed in an areanot overlapping with the semiconductor chip in a plan view. At thistime, the first electrode pads and the second electrode pads are exposedfrom an opening provided in an insulating film. The first electrode padsare covered, at the peripheral edge thereof, with an insulating film,while the profile of the second electrode pads is smaller than theopening portion.

Japanese Patent Laid-Open No. 2005-252074 (Patent Document 4) describesthe following technology. Described specifically, a plurality ofelectrode pads placed on the back surface of a wiring board is exposedfrom an opening portion provided in an insulating film. The electrodepads include a first electrode pad having a profile smaller than theopening portion and a second electrode pad covered at the peripheraledge thereof with an insulating film. At this time, the second electrodepad is placed at least at a position most distant from a semiconductorchip.

PATENT DOCUMENTS

-   [Patent Document 1] Japanese Patent Laid-Open No. 2007-81374-   [Patent Document 2] Japanese Patent Laid-Open No. 2010-245455-   [Patent Document 3] Japanese Patent Laid-Open No. 2009-21366-   [Patent Document 4] Japanese Patent Laid-Open No. 2005-252074

SUMMARY

For example, a semiconductor device having a wiring board on which asemiconductor chip is mounted is coupled to a mounting substrate via aball. This means that the wiring board has, on the back surface thereof,a plurality of lands and a plurality of balls is placed so as to becoupled to the lands. The wiring board is mounted on the mountingsubstrate via these balls. In a reliability test (temperature cyclingtest after mounting) conducted after the semiconductor device is mountedon the mounting substrate, fracture and separation of a ball placed inan area of the back surface of the wiring board overlapping with amounting area of the semiconductor chip in a plan view have become aproblem.

The other problem and novel features of the invention will be apparentfrom the description herein and accompanying drawings.

According to First Embodiment, a wiring board (through-hole wiringboard) having thereon a semiconductor chip has, on the back surfacethereof, a plurality of lands to be coupled to a plurality of balls,respectively. A plurality of first lands, among the lands, placed in anarea overlapping with the semiconductor chip in a plan view is embracedin a plurality of opening portions provided in an insulating film.

First Embodiment makes it possible to improve the reliability of asemiconductor device to be mounted on a mounting substrate, for example,by using a ball.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top view showing the configuration of the appearance of asemiconductor chip according to a first related technology;

FIG. 2 is a side view showing the configuration of a semiconductordevice according to the first related technology;

FIG. 3 shows a portion of the semiconductor device according to thefirst related technology and also shows an internal structure of abuildup wiring board;

FIG. 4 shows the surface structure of a semiconductor chip according toa second related technology;

FIG. 5 is a side view showing the configuration of the semiconductordevice according to the second related technology;

FIG. 6 shows a portion of the semiconductor device according to thesecond related technology and also shows an internal structure of athrough-hole wiring board;

FIG. 7 is a plan view showing the partial configuration of thethrough-hole wiring board according to the second related technology;

FIG. 8 shows a configuration example of placing a terminal on athrough-hole;

FIG. 9 shows a configuration example when misalignment occurs betweenthe through-hole and a land;

FIG. 10 is a cross-sectional view showing a hemispherical bump electrodemade of a solder which has been mounted on the through-hole wiring boardafter size reduction;

FIG. 11 is a partial cross-sectional view of a pillared bump electrodemounted on the through-hole wiring board;

FIG. 12 is a cross-sectional view showing a stud bump electrode made ofgold mounted on the through-hole wiring board;

FIG. 13 is a plan view of the through-hole wiring board according to thesecond related technology when viewed from the surface side;

FIG. 14 is a plan view of the through-hole wiring board according to thesecond related technology when viewed from the back surface;

FIG. 15 is a schematic view showing the simulation of a temperaturecycling test conducted with the through-hole wiring board having thereonthe semiconductor chip mounted on a mounting substrate;

FIG. 16 shows the fracture and separation of a solder ball which hascoupled the through-hole wiring board and the mounting substrate to eachother;

FIG. 17 shows one example of a land having an SMD structure;

FIG. 18 is a cross-sectional view taken along a line A-A of FIG. 17;

FIG. 19 is a cross-sectional view showing a solder ball mounted on theland having an SMD structure;

FIG. 20 shows one example of a land having an NSMD structure;

FIG. 21 is a cross-sectional view taken along a line A-A of FIG. 20;

FIG. 22 is a cross-sectional view showing a solder ball mounted on theland having an NSMD structure;

FIG. 23 is a plan view showing the configuration of a through-holewiring board according to an embodiment;

FIG. 24 shows a portion of a semiconductor device according to theembodiment and also shows an internal structure of a through-hole wiringboard;

FIG. 25 is a plan view showing the configuration of a through-holewiring board according to Modification Example 1;

FIG. 26 is a plan view showing the configuration of a through-holewiring board according to Modification Example 2;

FIG. 27 is a plan view showing the configuration of a through-holewiring board according to Modification Example 3;

FIG. 28 is a plan view showing the configuration of a through-holewiring board according to Modification Example 4;

FIG. 29 is a plan view showing the configuration of a through-holewiring board according to Modification Example 5;

FIG. 30 is a cross-sectional view showing a manufacturing step of thethrough-hole wiring board according to the embodiment;

FIG. 31 is a cross-sectional view showing a manufacturing step of thethrough-hole wiring board following the step shown in FIG. 30;

FIG. 32 is a cross-sectional view showing a manufacturing step of thethrough-hole wiring board following the step shown in FIG. 31;

FIG. 33 is a cross-sectional view showing a manufacturing step of thethrough-hole wiring board following the step shown in FIG. 32;

FIG. 34 is a cross-sectional view showing a manufacturing step of thethrough-hole wiring board following the step shown in FIG. 33;

FIG. 35 is a cross-sectional view showing a manufacturing step of thethrough-hole wiring board following the step shown in FIG. 34;

FIG. 36 is a schematic view showing a manufacturing step of thesemiconductor device according to the embodiment;

FIG. 37 is a schematic view showing a manufacturing step of thesemiconductor device following the step shown in FIG. 36;

FIG. 38 is a schematic view showing a manufacturing step of thesemiconductor device following the step shown in FIG. 37; and

FIG. 39 is a schematic view showing a manufacturing step of thesemiconductor device following the step shown in FIG. 38.

DETAILED DESCRIPTION

In the following embodiment, a description will be made after dividedinto a plurality of sections or embodiments if necessary for conveniencesake. They are not independent from each other, but in a relation suchthat one is a modification example, details, a complementarydescription, or the like of a part or whole of the other one unlessotherwise specifically indicated.

In the below-described embodiments, when a reference is made to thenumber of elements (including the number, value, amount, range, or thelike), the number is not limited to a specific number but may be greaterthan or less than the specific number, unless otherwise specificallyindicated or principally apparent that the number is limited to thespecific number.

Further, in the below-described embodiments, it is needless to say thatthe constituent elements (including element steps or the like) are notalways essential unless otherwise specifically indicated or principallyapparent that they are essential.

Similarly, in the below-described embodiments, when a reference is madeto the shape, positional relationship, or the like of the constituentelements, that substantially approximate or similar to it is alsoembraced unless otherwise specifically indicated or principally apparentthat it is not. This also applies to the above-described value andrange.

In all the drawings for describing the below-described embodiment,members of a like function will be identified by like reference numeralsin principle and descriptions will not be repeated. To facilitateviewing of the drawings, some plan views may be hatched

<Description on First Related Technology>

For example, a semiconductor device is comprised of a semiconductor chipin which a semiconductor element such as MOSFET (Metal OxideSemiconductor Field Effect Transistor) and a multilayer wiring have beenformed and a package formed to cover this semiconductor chip. Thepackage has (1) a function of electrically coupling the semiconductorelement formed on the semiconductor chip to an external circuit and (2)a function of protecting the semiconductor chip from outsidecircumstances such as humidity and temperature and preventing breakagedue to oscillation or impact and deterioration in the properties of thesemiconductor chip. Further, the package also has (3) a function offacilitating handling of the semiconductor chip and (4) a function ofreleasing heat upon operation of the semiconductor chip and therebyallows the semiconductor element to exhibit its function fully. Thereare various kinds of packages having such functions.

First, the first related technology investigated by the presentinventors will be described referring to some drawings. FIG. 1 is a topview showing the configuration of the appearance of a semiconductor chipCHP1 investigated by the present inventors. As shown in FIG. 1, thesemiconductor chip CHP1 is rectangular and has bump electrodes BMP,which are external coupling terminals, throughout the surface of thesemiconductor chip CHP1. A semiconductor device according to the firstrelated technology investigated by the present inventors can be obtainedby packaging the semiconductor chip CHP1 having such a configuration.

FIG. 2 is a side view showing the configuration of the semiconductordevice according to the first related technology investigated by thepresent inventors. As shown in FIG. 2, the semiconductor deviceinvestigated by the present inventors has a buildup wiring board BPWBand this buildup wiring board BPWB has, on the back surface (lowersurface) thereof, a plurality of solder balls SB. The buildup wiringboard BPWB has, on the surface (upper surface) thereof, thesemiconductor chip CHP1. Here, the semiconductor chip CHP1 is placed onthe buildup wiring board BPWB so that a plurality of bump electrodesformed on the semiconductor chip CHP1 are electrically coupled toterminals (not illustrated) formed on the surface of the buildup wiringboard BPWB. A space formed between the semiconductor chip CHP1 and thebuildup wiring board BPWB is filled with an underfill UF which is asealing resin. This underfill UF is often made of an epoxy resin and isused for ensuring coupling reliability between the semiconductor chipCHP1 and the buildup wiring board BPWB. The semiconductor chip CHP1 has,on the upper surface thereof, a heat sink HS via a silicone resin SCE.This heat sink HS is provided in order to efficiently release the heatgenerated from the semiconductor chip CHP1 to the outside. In short, theheat sink HS is provided in order to improve the heat dissipationefficiency of the semiconductor chip CHP1.

The semiconductor device investigated by the present inventors andhaving such a configuration, particularly an internal structure of thebuildup wiring board PBWB, will next be described more specifically.FIG. 3 shows a portion of the semiconductor device investigated by thepresent inventors and it shows the internal structure of the buildupwiring board BPWB. As shown in FIG. 3, the buildup wiring board BPWB iscomprised of a core layer CRL and a buildup layer BPL1 and a builduplayer BPL2 placed to sandwich this core layer CRL therebetween.

More specifically, the core layer CRL has therein a through-hole TH andthe buildup layer BPL 1 has a multilayer wiring (two layers in FIG. 3)to be coupled to this through-hole TH. The wirings of this multilayerwiring are coupled to each other through a via VA formed in the builduplayer BPL1. The buildup layer BPL1 has, on the surface thereof, a solderresist SR and from an opening provided in this solder resist SR, aterminal TE configuring the buildup layer BPL1 is exposed. Thesemiconductor chip CHP1 is mounted on the buildup wiring board BPWB soas to electrically couple this terminal TE and the bump electrode BMP toeach other.

On the other hand, the buildup layer BPL2 also has a multilayer wiring(two layers in FIG. 3) to be coupled to the through-hole TH formed inthe core layer CRL. This buildup layer BPL2 has, on the surface thereof,a solder resist SR and a land LND (back surface terminal) configuringthe buildup layer BPL2 is exposed from an opening provided in thissolder resist SR. A solder ball SB is mounted on the land LND so as tobe electrically coupled to this land LND. More specifically, in thebuildup wiring board BPWB as shown in FIG. 3, the thickness of thewiring board, that is, a total thickness of the core layer CRL (about0.8 mm), the buildup layer BPL1, and the buildup layer BPL2 is about 1.0mm, the diameter of the through-hole TH is from about 150 to 250 μm, andthe diameter of the via VA is about 50 μm.

The buildup wiring board BPWB having such a configuration has anadvantage that it is easy to form fine-pitch wiring, responding to anincrease in the density of bump electrodes BMP formed on thesemiconductor chip CHP1. Described specifically, the buildup wiringboard BPWB has the buildup layer BPL1 and the buildup layer BPL2 so asto sandwich the core layer CRL therebetween. A microvia VA is formed inthe buildup layer BPL1 or the buildup layer BPL2 and this via VA can beplaced freely. In addition, a terminal TE may be placed on this microviaVA.

The reason of it will next be described. The microvia formed in thebuildup layer BPL1 or the buildup layer BPL2 has a fine diameter so thatthe microvia VA can be filled with a conductor film easily. As a result,the upper portion of the microvia VA can be covered with the conductorfilm so that even if a terminal TE is placed on the microvia VA, securecoupling can be realized between the microvia VA and the terminal TE.Thus, the buildup wiring board BPWB has an advantage that since theterminal TE can be placed on the microvia VA, there are not manyrestrictions on the formation of wirings and fine-pitch wiring can beformed easily.

Further, as shown in FIG. 3, in the buildup wiring board BPWB, a platingfilm is formed on the wall surface of the through-hole TH formed in thecore layer CRL, but the plating film is not formed inside thethrough-hole TH because the through-hole TH has a large diameter. Asshown in FIG. 3, however, a hole filling resin is buried in thethrough-hole TH and the through-hole TH is filled with it. In thebuildup wiring board BPWB shown in FIG. 3, a microvia VA or wiring maybe placed even on the through-hole TH. From this standpoint, the numberof limitations on the formation of wirings decrease, which makes it easyto form fine-pitch wiring.

As a result of the investigation, however, the present inventors havefound that there is a room for improvement as shown below in theabove-mentioned buildup wiring board BPWB. For example, as thesemiconductor device operates, the semiconductor chip CHP1 generatesheat. The heat thus generated transfers from the semiconductor chip CHP1to the buildup wiring board BPWB. The heat thus applied to the buildupwiring board BPWB expands the buildup wiring board BPWB. Excessiveexpansion of the buildup wiring board BPWB may put a stress on a sealingresin (underfill UF), which seals the space between the buildup wiringboard BPWB and the semiconductor chip CHP1, cause cracks at theinterface between the semiconductor chip and the sealing resin or at theinterface between the sealing resin and the buildup wiring board, anddeteriorate the reliability of a semiconductor device.

In order to reduce the thermal expansion coefficient (α) of the buildupwiring board BPWB (in order to bring it close to the thermal expansioncoefficient of the semiconductor chip CHP1), a core layer CRL containinga glass cloth, which is a woven cloth made of glass fibers, is providedto reduce the thermal expansion coefficient of the buildup wiring boardBPWB. It becomes however difficult to form a microvia VA when thebuildup wiring board BPWB is comprised only of the core layer CRLcontaining a glass cloth. It is therefore the common practice to providebuildup layers BPL1 and BPL2 so as to sandwich the core layer CRLtherebetween and form a microvia VA without incorporating the glasscloth in the buildup layers BPL1 and BPL2. In short, since the builduplayers BPL1 and BPL2 are free from the glass cloth, a microvia VA can beformed. The buildup layer BPL1 (BPL2) is however required to have asmall thermal expansion coefficient so that a glass filler (glass in theform of particles or beads) is added thereto instead of the glass cloth.

As described above, the core layer CRL contains a glass cloth, while thebuildup layer BPL1 (BPL2) contains a glass filler instead of the glasscloth. The thermal expansion coefficient of the buildup layer BPL1(BPL2) containing a glass filler does not become as small as the thermalexpansion coefficient of the core layer CRL containing a glass cloth.For example, the thermal expansion coefficient of the core layer is fromabout 17 to 20 ppm and the thermal expansion coefficient of the builduplayer is from about 40 to 60 ppm. As a result, there appears adifference in the thermal expansion coefficient between the builduplayer BPL1 (BPL2) and the core layer CRL and a thermal stress due to adifference in the thermal expansion coefficient is inevitably appliedbetween the buildup layer BPL1 (BPL2) and the core layer CRL. Thepresent inventors have found that this thermal stress tends toelectrically disconnect the microvia VA formed in the buildup layer BPL1(BPL2) and the semiconductor device thus obtained may presumably havedeteriorated reliability.

In the second related technology, a measure for improving thereliability of a semiconductor device has been devised. Thesemiconductor device according to the second related technology obtainedusing this measure will next be described.

<Constitution of Semiconductor Device According to Second RelatedTechnology>

FIG. 4 shows the surface structure of a semiconductor chip CHP2according to the second related technology. As shown in FIG. 4, thesemiconductor chip CHP2 according to the second related technology isrectangular and has, in a surface area of the semiconductor chip CHP2, apillared bump electrode (pillared protruding electrode) PLBMP1 and apillared bump electrode PLBMP2. These pillared bump electrode PLBMP1 andpillared bump electrode PLBMP2 are comprised of, for example, a pillarportion made of copper (Cu) and a coupling portion formed on this pillarportion and made of a solder. The pillar portion has a height of, forexample, about 30 μm and the coupling portion has a height (solderheight) of about 15 μm. The pillar portion is cylindrical or cuboidaland in a plan view, the cylindrical one has a diameter of from about 30to 35 μm and the cuboidal one has from about 30 to 35 μm on a side.

Described specifically, in the semiconductor chip CHP2 according to thesecond related technology, when the surface are of the semiconductorchip CHP2 is divided into an area AR1, an area AR2 which is presentinside the area AR1, and an area AR3 which is present inside the areaAR2, a plurality of pillared bump electrodes PLBMP1 are formed in thearea AR1 and a plurality of pillared bump electrodes PLBMP2 are formedin the area AR3. This means that the pillared bump electrodes PLBMP1 andthe pillared bump electrodes PLBMP2 are spaced apart with the area AR2therebetween. Here, in the area AR1, two or more rows (two rows in FIG.4) of pillared bump electrodes PLBMP1 are formed and in the area AR3,two or more pillared bump electrodes PLBMP2 are formed uniformly.

Here, the minimum pitch between the bumps of the pillared bumpelectrodes PLBMP1 placed in the area AR1 is smaller than the minimumpitch between the bumps of the pillared bump electrodes PLBMP2 placed inthe area AR3. The minimum pitch between the bumps of the pillared bumpelectrodes PLBMP1 placed in the area AR1 is from about 40 to 60 μm. Evenif the minimum pitch between the bumps of the pillared bump electrodesPLBMP1 is equal to or greater than the minimum pitch between the bumpsof the pillared bump electrodes PLBMP2, however, no particular problemoccurs.

On the other hand, the area AR2 has therein neither pillared bumpelectrode PLBMP1 nor pillared bump electrode PLBMP.

This means that the semiconductor chip CHP2 in the second relatedtechnology is characterized by that the pillared bump electrodes PLBMP1(PLBMP2) are not formed throughout the surface of the semiconductor chipCHP2 but the pillared bump electrodes PLBMP1 (PLBMP2) are formed only inthe area AR1 and the area AR3 and no pillared bump electrode PLBMP1(PLBMP2) is formed in the area AR2. For example, the semiconductor chipCHP1 of the first related technology investigated by the presentinventors and shown in FIG. 1, has bump electrodes BMP throughout thesurface of the semiconductor chip CHP1. On the other hand, in thesemiconductor chip CHP2 of the second related technology shown in FIG.4, the pillared bump electrodes PLBMP1 (PLBMP2) are formed only in thearea AR1 and area AR3 and no pillared bump electrode PLBMP1 (PLBMP2) isformed in the area AR2.

Next, the configuration of the semiconductor device according to thesecond related technology will be described. FIG. 5 is a side viewshowing the configuration of the semiconductor device according to thesecond related technology. As shown in FIG. 5, the semiconductor deviceaccording to the second technology has a through-hole wiring board THWBand this through-hole wiring board THWB has, on the back surface (lowersurface) thereof, a plurality of solder balls SB. On the other hand, thethrough-hole wiring board THWB has, on the surface (upper surface)thereof, a semiconductor chip CHP2. Here, the semiconductor chip CHP2 isplaced on the through-hole wiring board THWB so that a plurality ofpillared bump electrodes PLBMP1 and a plurality of pillared bumpelectrodes PLBMP2 formed on the semiconductor chip CHP2 are electricallycoupled to terminals (not illustrated) formed on the surface of thethrough-hole wiring board THWB. A space formed between the semiconductorchip CHP2 and the through-hole wiring board THWB is filled with anunderfill UF, which is a sealing resin. As this underfill UF, an epoxyresin is often used and the underfill is used for ensuring couplingreliability between the semiconductor chip CHP2 and the through-holewiring board THWB. In the semiconductor device according to the secondrelated technology, a portion of the back surface of the semiconductorchip CHP2 which is opposite to the lower surface (bump electrodeformation surface) of the semiconductor chip and a portion of thesurface (main surface, upper surface) of the through-hole wiring boardTHWB are not covered with the underfill UF which is a sealing resin.

Next, the semiconductor device according to the second relatedtechnology having such a configuration, in particular, the internalstructure of the through-hole wiring board THWB will be described morespecifically.

FIG. 6 shows a portion of the semiconductor device according to thesecond related technology and shows an internal structure of thethrough-hole wiring board THWB. As shown in FIG. 6, in the secondrelated technology, the through-hole wiring board THWB is formed of acore layer CRL containing a glass cloth. This through-hole wiring boardTHWB has therein through-holes TH1, TH2, and TH3 penetrating from thesurface (upper surface) to the back surface (lower surface) of thethrough-hole wiring board THWB. The through-hole wiring board THWB has,on the surface thereof, a solder resist SR (first solder resist) andthis solder resist SR fills the through-holes TH1, TH2, and TH3therewith. The solder resist SR has therein an opening portion and fromthis opening portion, a plurality of terminals TE1 or a plurality ofterminals TE2 is exposed.

For example, the through-hole wiring board THWB has, on the surfacethereof, a plurality of terminals TE1 and some of the terminals TE1 areelectrically coupled to the through-hole TH1 on the surface of thethrough-hole wiring board THWB and the other terminals TE1 areelectrically coupled to the through-hole TH2 on the surface of thethrough-hole wiring board THWB. In addition, the through-hole wiringboard THWB has, on the surface thereof, a plurality of terminals TE2 andthese terminals TE2 are electrically coupled to the through-hole TH3 onthe surface of the through-hole wiring board THWB. At this time, thethrough-hole wiring board THWB has, on the surface thereof, thesemiconductor chip CHP2 and the pillared bump electrode PLBMP1 formed onthis semiconductor chip CHP2 and the terminals TE1 formed on the surfaceof the through-hole wiring board THWB are electrically coupled to eachother. Similarly, the pillared bump electrode PLBMP2 formed on thesemiconductor chip CHP2 and the terminal TE2 formed on the surface ofthe through-hole wiring board THWB are electrically coupled to eachother. This means that the through-hole wiring board THWB has, on thesurface and back surface of the core layer CRL, only one wiring layer.In other words, in the semiconductor device according to the secondtechnology, the pillared bump electrode is directly and electricallycoupled to the wiring layer of the device.

On the other hand, the through-hole wiring board THWB has, on the backsurface thereof, a solder resist SR (second solder resist). The solderresist SR has therein an opening portion and from this opening portion,a plurality of lands LND1 (back-surface terminals) or a plurality oflands LND2. These lands LND1 are electrically coupled to thethrough-holes TH1 and TH3 on the back surface of the through-hole wiringboard THWB, while the lands LND2 are electrically coupled to thethrough-hole TH2 on the back surface of the through-hole wiring boardTHWB. The lands LND1 have thereon a solder ball SB1 and the lands LND2have thereon a solder ball SB2. More specifically, in the through-holewiring board THWB according to the second related technology, thethickness of the wiring board (in consideration of the wiring thicknesson the surface and back surface) attributable to the core layer CRL(about 0.4 mm) is about 0.5 mm and the through-hole diameter is about150 μm.

The second related technology is characterized by the formation positionof the through-holes TH1, TH2, and TH3 in the through-hole wiring boardTHWB or the formation position of the terminals TE1 or terminals TE2formed on the surface of the through-hole wiring board THWB so thattheir configuration will next be outlined.

First, as shown in FIG. 6, the through-hole wiring board THWB hasthereon the semiconductor chip CHP2 and it is divided into the followingareas. As shown in FIG. 6, in an area on the through-hole wiring boardTHWB, an outer area having thereon no semiconductor chip CHP2 is definedas an area AR0. The area on the semiconductor chip CHP2 is divided intoan area AR1 on the semiconductor chip CHP2, an area AR2 on thesemiconductor chip CHP2, and an area AR3 on the semiconductor chip CHP2corresponding to the area division shown in FIG. 4. Thus, the surfacearea of the through-hole wiring board THWB can be divided into theabove-mentioned four areas.

Here, the area AR0 will be described. In the through-hole wiring boardTHWB, the area AR0 has therein a plurality of through-holes TH2. Thismeans that the area AR0 of the surface area of the through-hole wiringboard THWB has a plurality of through-holes TH2 in this area but hasneither terminals TE1 nor terminals TE2. In particular, although thethrough-holes TH2 are electrically coupled to the terminals TE1, theseterminals TE1 are not formed in the area AR0 having therein thethrough-holes TH2.

Next, the area AR1 will be described. In the through-hole wiring boardTHWB, the area AR1 has therein a plurality of terminals TE1. This meansthat the area AR1 of the surface area of the through-hole wiring boardTHWB has therein a plurality of terminals TE1 but has none of thethrough-holes TH1, TH2, and TH3. In particular, some of the terminalsTE1 of the plurality of terminals TE1 are electrically coupled to thethrough-hole TH1, while the other terminals TE1 of the plurality ofterminals TE1 are electrically coupled to the through-hole TH2. The areaAR1 having therein the terminals TE1 has neither the through-hole TH1nor the through-hole TH2. The area AR1 of the semiconductor chip CHP2has therein a plurality of pillared bump electrodes PLBMP1 and thepillared bump electrodes PLBMP1 formed in the area AR1 of thesemiconductor chip CHP2 are directly coupled to the terminals TE1 formedin the area AR1 of the through-hole wiring board THWB.

An area of the back surface of the through-hole wiring board THWBoverlapping with the area AR1 in a plan view has therein none of thelands LND1 and LND2 and the solder balls SB1 and SB2 to be mounted onthe lands LND1 and LND2. In other words, in a plan view, the lands LND1and LND2 are placed so as not to overlap with the area AR1.

Next, the area AR2 will be described The area AR2 of the through-holewiring board THWB has therein a plurality of through-holes TH1. Thismeans that the area AR2 of the surface area of the through-hole wiringboard THWB has therein a plurality of through-holes TH1 but has neitherthe terminals TE1 nor the terminals TE2. In particular, thethrough-holes TH1 are electrically coupled to the terminals TE1, butthese terminals TE1 are not formed in the area AR2 having therein thethrough-holes TH1. The area AR2 of the semiconductor chip CHP2 hastherein neither a plurality of pillared bump electrodes PLBMP1 norpillared bump electrode PLBMP2.

The area AR3 will next be described. The area AR3 of the through-holewiring board THWB has therein a plurality of through-holes TH3 and aplurality of terminals TE2. This means that the area AR3 of the surfacearea of the through-hole wiring board THWB has therein both a pluralityof through-holes TH3 and a plurality of terminals TE2. In particular,the through-holes TH3 are electrically coupled to the terminals TE2 andthese terminals TE2 are formed in the area AR3 having therein thethrough-holes TH3. The area AR3 of the semiconductor chip CHP2 hastherein a plurality of pillared bump electrodes PLBMP2 and the pillaredbump electrodes PLBMP formed in the area AR3 of the semiconductor chipCHP2 are directly coupled to the terminals TE2 formed in the area AR3 ofthe through-hole wiring board THWB.

The through-hole wiring board THWB according to the second relatedtechnology has the configuration as described above. A furtherdescription will be made using a plan view in order to clarify thepositional relationship of the through-holes TH1, TH2, and TH3 and theterminals TE1 and TE2.

FIG. 7 is a plan view showing a partial configuration of thethrough-hole wiring board THWB according to the second relatedtechnology. FIG. 7 shows roughly the one fourth of the whole area of thethrough-hole wiring board THWB. In addition, FIG. 7 shows the area AR0,area AR1, area AR2, and area AR3.

It is apparent from FIGS. 6 and 7 that the area AR0 is an area locatedoutside the outer circumference of the semiconductor chip CHP2 in a planview. In other words, the area AR0 is an area not overlapping with thesemiconductor chip CHP2 in a plan view. Moreover, the area AR1, areaAR2, and area AR3 are each an area located inside the outercircumference of the semiconductor chip CHP2 in a plan view. In otherwords, the area AR1, area AR2, and the area AR3 are areas overlappingwith the semiconductor chip CHP2 in a plan view.

In FIG. 7, the area AR1 has therein a plurality of terminals TE1. Morespecifically, the area AR1 has therein a plurality of terminals TE1 intwo rows. For example, the number of the terminals TE1 placed in a rownear the outside is greater than that of the terminals TE1 placed in arow near the inside. The terminals TE1 placed in the row near theoutside are electrically coupled to the through-holes TH2 formed in thearea AR0. More specifically, the area R0 has therein a plurality ofthrough-holes TH2 and foot patterns FP2 are formed so as to be broughtinto contact with these through-holes TH2. These foot patterns FP2 andthe terminals TE1 placed in a row near the outside are coupled to eachother with a wiring WIRE2.

On the other hand, the terminals TE1 placed in a row near the inside areelectrically coupled to the through-holes TH1 formed in the area AR2.More specifically, the area AR2 has therein a plurality of through-holesTH1 and foot patterns FP1 are formed so as to be brought into contactwith these through-holes TH1. These foot patterns FP1 and the terminalsTE1 placed in a row near the inside are coupled to each other with awiring WIRE1.

Next, the area AR3 has therein a plurality of through-holes TH3 and aplurality of terminals TE2. The terminals TE2 formed in the area AR3 areelectrically coupled to the through-holes TH3 formed also in the areaAR3. More specifically, the area AR3 has therein a plurality of throughholes TH3 and foot patterns FP3 are formed so as to be brought intocontact with the through-holes TH3. These foot patterns FP3 and theterminals TE2 are coupled to each other with a wiring WIRE3. This meansthat the terminals TE1 and the terminals TE2 are spaced apart with thearea AR2 therebetween.

<Characteristics of Semiconductor Device According to Second RelatedTechnology>

The semiconductor device according to the second related technology hasthe above-mentioned configuration. Characteristics of it willhereinafter be described in detail. First characteristic of the secondrelated technology is, for example, as shown in FIG. 6, use of athrough-hole wiring board THWB as a wiring board on which thesemiconductor chip CHP2 is to be mounted. This means that in the secondrelated technology, the through-hole wiring board THWB as shown in FIG.6 is used without using the buildup wiring board BPWB as shown in FIG.3.

For example, in the buildup wiring board BPWB as shown in FIG. 3, due toa difference in material between the core layer CRL containing a glasscloth and the buildup layer BPL1 (BPL2) containing a glass fillerinstead of the glass cloth, there exists a difference in thermalexpansion coefficient (α) between the core layer CRL and the builduplayer BPL1 (BPL2). When the semiconductor chip CHP1 is heated and athermal load is applied to the buildup wiring board BPWB, a microvia VAformed in the buildup layer BPL1 (BPL2) is exposed to a thermal stressdue to a difference in thermal expansion coefficient between the corelayer CRL and the buildup layer BPL1 (BPL2) and electric disconnectionof the microvia VA tends to occur. As a result, the resultingsemiconductor device inevitably has deteriorated reliability.

In the second related technology, on the other hand, not the buildupwiring board BPWB but the through-hole wiring board THWB is used. Thisthrough-hole wiring board THWB is comprised only of a core layer CRLcontaining a glass cloth, for example, as shown in FIG. 6 and does nothave the buildup layer BPL1 (BLP2). In the through-hole wiring boardTHWB, therefore, there does not occur electrical disconnection of amicrovia formed in the buildup layer BPL1 (BPL2) which will otherwiseoccur due to a difference in thermal expansion coefficient between thecore layer CRL and the buildup layer BPL1 (BPL2). In other words, sincethe through-hole wiring board THWB has therein no buildup layer BPL1(BPL2) and therefore has no microvia formed in the buildup layer BPL1(BPL2), it is possible to avoid a problem such as electricaldisconnection of a microvia. Thus, in the second related technology, athrough-hole wiring board THWP comprised only of a core layer CRL isused so that it is unnecessary to consider a difference in thermalexpansion coefficient between the buildup layer BPL1 (BPL2) and the corelayer CRL and in addition, due to absence of the buildup layer BPL1(BPL2), it is unnecessary to consider electrical disconnection of amicrovia VA formed in the buildup layer BPL1 (BPL2). According to thesecond related technology, as a result, a semiconductor device havingimproved reliability can be obtained.

Moreover, the buildup wiring board BPWB has therein the buildup layerBPL1 (BPL2) with a large thermal expansion coefficient so that a largethermal stress tends to be applied to a sealing resin (underfill UF) forsealing the space between the buildup wiring board BPWB and thesemiconductor chip CHP1. There is a high possibility of cracks appearingin the sealing resin.

In the second related technology, on the other hand, used is athrough-hole wiring board (THWB) which has therein no buildup layer BPL1(BPL2) with a large thermal expansion coefficient but is comprised onlyof a core layer CRL with a small thermal expansion coefficient. Not solarge thermal stress is applied to a sealing resin (underfill UF) forsealing the space between the through-hole wiring board THWB and thesemiconductor chip CHP2 compared with the case where the buildup wiringboard BPWB is used. It is therefore possible to reduce the possibilityof causing cracks in the sealing resin. Also from this standpoint, asemiconductor device having improved reliability can be providedaccording to the second related technology.

Thus, an advantage of using the through-hole wiring board THWB has beendescribed, but the through-hole wiring board THWB has a disadvantage aswell as the above-mentioned advantage. This disadvantage willhereinafter be described and a measure for overcoming this disadvantageof the through-hole wiring board THWB taken in the second relatedtechnology will also be described.

First, in the buildup wiring board BPWB, for example, as shown in FIG.3, a microvia VA is filled with a conductor film so that a terminal TEcan be formed on the microvia VA. In the buildup wiring board BPWB, aterminal TE can be placed even on the microvia VA and thus, limitationson the formation of wirings are not so many. This facilitates formationof fine-pitch wiring.

On the other hand, the through-hole wiring board THWB is, for example,as shown in FIG. 6, comprised only of a core layer CRL and through-holesTH1, TH2, and TH3 penetrating through this core layer CRL. In otherwords, the through-hole wiring board THWB according to the secondrelated technology has therein through-holes TH1, TH2, and TH3 whichpenetrate from the surface to the back surface but there is a limitationthat neither terminal TE1 nor terminal TE2 can be placed on thesethrough-holes TH1, TH2, and TH3. The following is the reason of it.

The diameter of the through-holes TH1, TH2, and TH3 formed in thethrough-hole wiring board THWB is, for example, about 150 μm, greaterthan the diameter (about 50 μm) of a microvia. Even if a plating film(conductor film) is formed in the through-holes TH1, TH2, and TH3, theplating film is formed only on the inside wall and the through-holesTH1, TH2, and TH3 inevitably have a hollow inside without being filledwith the plating film.

With the through-hole TH1 as an example, among the through-holes TH1,TH2, and TH3 having such a configuration, a description will next bemade on the placement of the terminal TE1 on the through-hole TH1. FIG.8 shows a configuration example of placing a terminal TE1 on athrough-hole TH1. As shown in FIG. 8, a foot pattern FP1 is formed so asto surround the upper surface of a hollow-state through hole TH1. Thefoot pattern FP1 has a diameter of about 250 μm. Since the through-holeTH1 is hollow, the plating film formed on the side surface of thethrough-hole TH1 and the foot pattern FP1 are electrically coupled byforming the foot pattern FP1 so as to surround the upper surface of thethrough-hole TH1. Formation of the terminal TE1 on this foot pattern FP1is presumed to enable placement of the terminal TE1 on the through-holeTH1 via the foot pattern FP1.

In practice, however, as shown in FIG. 9, misalignment between the footpattern FP1 and the through-hole TH1 may occur due to poor patterningaccuracy upon formation of the through-hole TH and the foot pattern FP1.In this case, the terminal TE1 is inevitably placed on the hollow-statethrough-hole TH1 without being placed on the foot pattern FP1. Then, thethrough-hole TH1 becomes hollow, which prevents electrical couplingbetween the terminal TE1 and the through-hole TH1. Since thethrough-hole TH1 formed in the through-hole wiring board THWB has alarge diameter, the through-hole becomes hollow and at the same time,misalignment occurs between the through-hole TH1 and the foot patternFP1 due to poor patterning accuracy. As a result, a coupling failure maypresumably occur between the through-hole TH1 and the terminal TE1 whenthe terminal TE1 is placed on the through-hole TH1.

Here, as in the through-hole TH formed in the buildup wiring board BPWBshown in FIG. 3, filling of the through-hole TH with a hole fillingresin can be considered in order to overcome the above problem. Thismeans that in the buildup wiring board BPWB, the through-hole TH with alarge diameter is filled with a hole filling resin. Then, a lid platingfilm is formed on the through-hole TH filled with the hole fillingresin, followed by the formation of a via VA or wiring on this lidplating film. In the buildup wiring board BPWB, a via or wiring isplaced even on the through-hole TH with a large diameter so that therestrictions in wiring can be reduced.

In the through-hole wiring board THWB (refer to FIG. 6) according to thesecond related technology, different from the buildup wiring board BPWBshown above in FIG. 3, the through-hole TH with a large diameter is notfilled with a hole filling resin, because the cost of the hole fillingresin itself and labor for filling the through-hole TH with the holefilling resin inevitably lead to an increased manufacturing cost. In thethrough-hole wiring board THWB, therefore the through-holes TH1, TH2,and TH3 are filled with a solder resist SR applied to the surface andback surface of the wiring board. In other words, a solder resist SR(first solder resist) applied to the surface of the through-hole wiringboard THWB and a solder resist SR (second solder resist) applied to theback surface of the through-hole wiring board THWB are coupled to eachother with solder resists SR with which the through-holes (TH1, TH2, andTH3) are filled.

It is to be noted that the solder resist SR (first solder resist) formedon the surface of the through-hole wiring board THWB, the solder resistSR (second solder resist) formed on the back surface of the through-holewiring board THWB, and the solder resists SR with which thethrough-holes (TH1, TH2, and TH3) are filled are all comprised of thesame material. This is one of the differences in structure between thethrough-hole wiring board THWB and the buildup wiring board BPWB.

Even in the through-hole wiring board THWB according to the secondrelated technology, by filling the through-hole TH1 with a hole fillingresin and forming a lid plating film, it is possible to electricallycouple the through-hole TH1 and the terminal TE1 surely even when theterminal TE1 is formed on the through-hole TH1. Such a configuration ishowever not employed in the through-hole wiring board THWB according tothe second related technology because the configuration inevitablyincreases the cost of the through-hole wiring board THWB. In thethrough-hole wiring board THWB according to the second relatedtechnology, therefore, there appears a problem that the terminal TE1cannot be placed on the through-hole TH1.

On the assumption that the terminal TE1 cannot be placed on thethrough-hole TH1, however, the second related technology takes a measureto form a wiring layout on the through-hole wiring board THWB asefficiently as possible and at the same time, suppress a cost increase.This measure is a second characteristic of the second relatedtechnology. This second characteristic will hereinafter be describedreferring to some drawings.

The second characteristic of the second related technology is, as shownfor example in FIG. 6, a wiring layout is devised while separating athrough-hole TH1 formation area, a through-hole TH2 formation area, anda terminal TE1 formation area from each other. More specifically, asshown in FIG. 6, a plurality of through-holes TH2 is provided in thearea AR0 of the through-hole wiring board THWB and a plurality ofterminals TE1 is provided in the area AR1 of the through-hole wiringboard THWB. In addition, a plurality of through-holes TH1 is provided inthe area AR2 of the through-hole wiring board THWB. Such a configurationenables formation of the through-holes TH1 and TH2 and the terminals TE1in/on the through-hole TH1 and the through-hole TH2 without placing theterminal TE1 on the through-hole TH1 and the through-hole TH2.

Moreover, the wiring layout thus devised will be described referring toFIG. 7. In FIG. 7, the terminals TE1 are formed in two rows in the areaAR1 of the through-hole wiring board THWB. A plurality of through-holesTH2 is placed in the area AR0 which is an area outside the area AR1. Inthe area AR2 which is an area inside the area AR1, on the other hand, aplurality of through-holes TH1 is placed. At this time, the terminalsTE1 in the row placed near the outside, between the two rows ofterminals TE1 formed in the area AR1, are electrically coupled to thethrough-holes TH2 placed in the area AR0, while the terminals TE1 in therow placed close to the inside, between the two rows of terminals TE1formed in the area AR1, are electrically coupled to the through-holesTH1 placed in the area AR2. Thus, in the second related technology, theterminals TE1 to be electrically coupled to the through-holes TH2 formedin the area AR0 are placed on the side near the area AR0 and theterminals TE1 to be electrically coupled to the through-holes TH1 formedin the area AR2 are placed on the side near the area AR2. Such aconfiguration makes it possible to realize coupling between thethrough-hole TH1 and the terminal TE1 and coupling between thethrough-hole TH2 and the terminal TE2 efficiently while separating thethrough-hole TH1 formation area, the through-hole TH2 formation area,and the terminal TE1 formation area from each other.

For example, there are cases where the through-holes TH2 formed in thearea AR0 are coupled to the terminals TE1 placed in the row near thearea AR2 or the through-holes TH1 formed in the area AR2 are coupled tothe terminals TE1 placed in the row near the area AR0. In such a case,wirings formed in the area AR1 need complex dragging, making itdifficult to configure an efficient wiring layout.

In the second related technology, as shown in FIG. 7, the terminals TE1to be electrically coupled to the through-holes TH2 formed in the areaAR0 are placed on the side near the area AR0 and at the same time, theterminals TE1 to be electrically coupled to the through-holes TH1 formedin the area AR2 are placed on the side near the area AR2.

In other words, in the area AR1, the terminals TE1 electrically coupledto the through-holes TH2 are placed so as to be closer to the area AR0than to the area AR2 and the terminals TE1 electrically coupled to thethrough-holes TH1 are placed so as to be closer to the area AR2 than tothe area AR0. At this time, the terminals TE1 are electrically coupledto the through-holes TH1 and TH2 via wirings WIRE1 and WIRE2,respectively. This means that there are no wirings which cross the areaAR1 to couple the area AR0 and the area AR2 or which run betweenterminals TE1.

By coupling wirings in such a manner, the second related technologymakes it possible to omit the dragging of the wirings in the area AR1and efficiently couple the through-holes TH1 to the terminals TE1 andefficiently couple the through-holes TH2 to the terminals TE1 whileseparating the through-hole TH1 formation area, the through-hole TH2formation area, and the terminal TE1 formation area from each other. Thethrough-hole wiring board THWB has only one wiring layer on each of thesurface and back surface of the core layer CRL so that high-densitywiring cannot be conducted in this structure compared with a structurein which a plurality of buildup layers (a plurality of layers as BPL1and a plurality of layers as BPL2) is provided on each of the surfaceand back surface of the core layer CRL of the buildup wiring board BPWBto form multilayer wiring. The above-described characteristic draggingmanner is therefore important in realizing high density wiring in thethrough-hole wiring board THWB comparable to that in the buildup wiringboard BPWB.

Another characteristic of the second related technology is that as shownin FIG. 7, the through-holes TH1 and the through-holes TH2 are formed innot one area but in both the area AR0 which is an area outside the areaA1 having therein the terminals TE1 and the area AR2 which is an areainside the area A1. Supposing that through-holes TH2 are formed only inthe area AR0 which is an area outside the area AR1 having therein theterminals TE1, the number of through-holes TH2 formed in the area AR0increases because the through-holes TH2 are formed only in the area AR0.This increases the number of wirings for electrically coupling aplurality of through-holes TH2 formed in the area AR0 and a plurality ofterminals TE1 formed in the area AR1, respectively. This requiresfine-pitch wiring to be laid from the area AR0 to the area AR1.

In the second related technology, however, not a buildup wiring boardsuited for fine-pitch wiring but a through-hole wiring board THWB lesssuited for fine-pitch wiring than the buildup wiring board is used. Thisreveals that it is difficult to realize, in the through-hole wiringboard THWB, the layout configuration in which through-holes TH2 areplaced densely only in the area AR0 as described above.

In the second related technology, therefore, there is devised a measureof not placing the through-holes TH2 densely in the area AR0 but placingthe through-holes TH1 and TH2 in the area AR0 and area AR2,respectively, while sandwiching therebetween the area AR1 having thereinthe terminals TE1. This makes it possible to distribute thethrough-holes TH1 and the through-holes TH2 in the area AR0 and the areaAR2 and therefore to disperse the wirings WIRE1 for coupling thethrough-holes TH1 and the terminals TE1 and the wirings WIRE2 forcoupling the through-holes TH2 and the terminals TE1 in different areaswithout increasing their density. As a result, even if the through-holewiring board THWB not suited for fine-pitch wiring is used, it ispossible to respond to an increase in the number of the through-holesTH1 (TH2) and terminals TE1 to satisfy a demand for semiconductordevices having a higher function. It has been found also from thisstandpoint that an efficient wiring layout is realized according to thesecond related technology.

As shown in FIG. 7, the area of the area AR0 is larger than that of thearea AR2 so that the number of the through-holes TH2 formed in the areaAR0 is larger than that of the through-holes TH1 formed in the area AR2.Accordingly, the number of the terminals TE1 to be electrically coupledto the through-holes TH2 formed in the area AR0 is larger than that ofthe terminals TE1 to be electrically coupled to the through-holes TH1formed in the area AR2. This suggests that the number of the terminalsTE1 placed on the side near the area AR0, among those formed in two rowsin the area AR1, is larger than that of the terminals TE1 placed on theside near the area AR2. Wirings for coupling the through-holes TH2formed in the area AR0 and the terminals TE1 formed in the area AR1include, for example, a power supply line for supplying a power supplypotential, a GND line for supplying a reference potential (GNDpotential), or a signal line for transferring a signal (signal voltage).Similarly, wirings for coupling the through-holes TH1 formed in the areaAR2 and the terminals TE1 formed in the area AR1 include, for example, apower supply line for supplying a power supply potential, a GND line forsupplying a reference potential (GND potential), or a signal line fortransferring a signal (signal voltage).

The third characteristic of the second related technology is that asshown in FIG. 6, a plurality of through-holes TH3 and a plurality ofterminals TE2 are formed in the area AR3. Described specifically, theprincipal technical concept of the second related technology is, asdescribed above in the description on the second characteristic, thatthe through-holes TH1 and the terminals TE1 are efficiently coupled toeach other and the through-holes TH2 and the terminals TE1 areefficiently coupled to each other while separating the through-hole TH1formation area, the through-hole TH2 formation area, and the terminalTE1 formation area to each other. The second related technology howeverhas a characteristic, as a third one, that a plurality of through-holesTH3 and a plurality of terminals TE2 are formed in the area AR3.

More specifically, as shown in FIG. 7, the area AR3 has therein aplurality of through-holes TH3 and a plurality of terminals TE2, but noterminals TE2 are placed on the through-holes TH3. This means that asshown in FIG. 7, foot patterns FP3 are formed so as to surround theupper portion of the through-holes TH3, but these foot patterns FP3 havethereon no terminals TE2. The foot patterns FP3 and the terminals TE2are coupled to each other with wirings WIRE3. The wirings WIRE3 formedin this area AR3 and coupling the through-holes TH3 to the terminals TE2are comprised only of, for example, a power supply line for supplying apower supply potential and a GND line for supplying a referencepotential (GND potential). This means that the wirings WIRE3 formed inthe area AR3 and coupling the through-holes TH3 to the terminals TE2 donot include a signal line for transferring a signal (signal voltage).

According to the second related technology, therefore, not only a powersupply potential and a reference potential can be supplied from some ofthe terminals TE1 formed in the area AR1 to the semiconductor chip CHP2but also a power supply potential and a reference potential can besupplied from the terminals TE2 formed in the area AR3 to thesemiconductor chip CHP2. This means that a power supply potential and areference potential can be supplied through not only from the area AR1of the semiconductor chip CHP2 but also from the area AR3 so that apower supply voltage drop (IR drop) in the semiconductor chip CHP2 canbe reduced

For example, when the through-holes TH3 and the terminals TE2configuring a power supply wiring and a reference wiring are not formedin the area AR3, a power supply potential and a reference potential canbe supplied to the inside of the semiconductor chip CHP2 only from theterminals TE1 formed in the area AR1. In this case, in order to supply apower supply potential and a reference potential to an integratedcircuit formed in the area AR3 of the semiconductor chip CHP2, it isnecessary to drag about an internal wiring of the semiconductor chipCHP2 from the area AR1 to the area AR3 of the semiconductor chip CHP2. Aresistance component derived from dragging of the internal wiringhowever inevitably causes a drop in power supply potential (power supplyvoltage drop).

In the second related technology, through-holes TH3 and terminals TE2which configure the power supply wiring and reference wiring are formedin the area AR3 of the through-hole wiring board THWB and from theseterminals TE2, a power supply potential and a reference potential aresupplied to the area AR3 of the semiconductor chip CHP2. The secondrelated technology makes it possible not only to supply a power supplypotential and a reference potential from some of the terminals TE1formed in the area AR1 to the semiconductor chip CHP2 but also to supplythe power supply potential and reference potential from the terminalsTE2 formed in the area AR3 to the semiconductor chip CHP2. In short,since the power supply potential and the reference potential can besupplied not only through the area AR1 of the semiconductor chip CHP2but also through the area A3, a power supply voltage drop (IR drop) inthe semiconductor chip CHP2 can be reduced.

The power supply potential and the reference potential to be suppliedfrom some of the terminals TE1 formed in the area AR1 can be supplied toan I/O circuit (external interface circuit) formed on the semiconductorchip CHP2. On the other hand, the power supply potential and thereference potential to be supplied from some of the terminals TE2 formedin the area AR3 can be supplied to a core circuit (internal circuit)formed on the semiconductor chip CHP2. This means that it is desired tosupply a power supply potential and a reference potential to the I/Ocircuit from a plurality of terminals TE1 formed in the area AR1 andsupply a power supply potential and a reference potential to the corecircuit which is driven at a voltage lower than that of the I/O circuitfrom a plurality of terminals TE2 formed in the area AR3. In otherwords, the power supply potential supplied from a plurality of terminalsTE1 formed in the area AR1 is higher than the power supply potentialsupplied from a plurality of terminals TE2 formed in the area AR3.

Since, for example, the pillared bump electrode PLBMP1 of thesemiconductor chip CHP2 to which the terminal TE1 is coupled is a bumpelectrode including an input/output signal pin, when a power supplypotential and a reference potential for the I/O circuit is supplied tothe terminal TE1, the above-mentioned configuration makes it possible tosupply the power supply potential and the reference potential for theI/O circuit efficiently with the shortest distance. On the other hand,since the pillared bump electrode PLBMP2 of the semiconductor chip CHP2to which the terminal TE2 is coupled is a bump electrode not includingan input/output signal pin, when a power potential and a referencepotential for the core circuit for driving an internal circuit (corecircuit) placed at the center portion of the semiconductor chip CHP2,the above-mentioned configuration makes it possible to supply the powersupply potential and the reference potential for the core circuitefficiently with the shortest distance.

Moreover, in the second related technology, with regard to thethrough-holes TH3 placed in the area AR3 of the through-hole wiringboard THWB, the through-holes TH3 for supplying a power supply potentialand the through-holes TH3 for supplying a referential potential arepreferably placed alternately. In this case, the power supply potentialand the reference potential can be supplied uniformly throughout thearea AR3 of the semiconductor chip CHP2.

More specifically, the semiconductor chip CH2 has, in the area AR3 atthe center portion of the semiconductor chip, an internal circuit (corecircuit) and it is possible to supply this core circuit with a powersupply potential and a reference potential uniformly by alternatelyplacing the through-holes TH3 for supplying a power supply potential andthe through-holes TH3 for supplying a reference potential. Supposingthat the through-holes T3 for supplying a power supply potential and thethrough-holes TH3 for supplying a reference potential are placed notuniformly, it will be difficult to uniformly supply the core circuitformed in the area AR3 with a power supply potential and a referencepotential. By alternately placing the through-holes TH3 for supplying apower supply potential and the through-holes TH3 for supplying areference potential, however, it is possible to uniformly supply thecore circuit with a power supply potential and a reference potential. Asa result, the core circuit has improved operation stability.

The through-hole wiring board THWB according to the second relatedtechnology therefore has the above-mentioned second characteristic andthe third characteristic. As shown in FIG. 6, the terminals TE1 areformed in the area AR1 of the through-hole wiring board THWB and theterminals TE2 are formed in the area AR3 of the through-hole wiringboard THWB. This means that according to the second related technology,all of the area AR1, the area AR2, and the area AR3 of the through-holewiring board THWB on which the semiconductor chip CHP2 is mounted do nothave terminals (terminal TE1 and TE2) so that the position of bumpelectrodes formed on the semiconductor chip CHP2 to be mounted on thethrough-hole wiring board THWB is also changed. More specifically, theconfiguration as shown in FIG. 1 in which bump electrodes BMP are formedthroughout the surface of a rectangular semiconductor chip CHP1 ischanged to the configuration as shown in FIG. 4 in which pillared bumpelectrodes PLBMP1 (PLBMP2) are formed only in the areas AR1 and AR3 of arectangular semiconductor chip CHP2.

The characteristic of the semiconductor chip CHP2 to be mounted on thethrough-hole wiring board THWB according to the second relatedtechnology will next be described. The fourth characteristic of thesecond related technology resides in the bump structure of thesemiconductor chip CHP2 to be mounted on the through-hole wiring boardTHWB. More specifically, as shown in FIG. 4, the semiconductor chip CHP2according to the second related technology has an area AR1, an area AR2inside this area AR1, and an area AR3 inside this area AR2. The area AR1has therein a pillared bump electrode PLBMP1 and the area AR3 hastherein a pillared bump electrode PLBMP2, while the area AR2 has thereinneither a pillared bump electrode PLBMP1 nor a pillared bump electrodePLBMP2.

FIG. 6 shows the semiconductor chip CHP2 with such a configurationmounted on the through-hole wiring board THWB. It has been found fromFIG. 6 that the pillared bump electrode PLBMP1 formed in the area AR1 ofthe semiconductor chip CHP2 is directly coupled to the terminal TE1formed in the area AR1 of the through-hole wiring board THWB and thepillared bump electrode PLBMP2 formed in the area AR3 of thesemiconductor chip CHP2 is directly coupled to the terminal TE2 formedin the area AR3 of the through-hole wiring board PLBMP2. In other words,a portion where the pillared bump electrode PLBMP1 is coupled to theterminal TE1 and a portion where the pillared bump electrode PLBMP2 iscoupled to the terminal TE2 are placed separately with the area AR2 ofthe semiconductor chip CHP2 (through-hole wiring board THWB)therebetween.

Here, the problem which occurs in changing the bump structure from thatof the semiconductor chip CHP1 shown in FIG. 1 to that of thesemiconductor chip CHP2 shown in FIG. 4 will next be described. Forexample, the bump structure is changed from that of the semiconductorchip CHP1 shown in FIG. 1 to that of the semiconductor chip CHP2 shownin FIG. 4 without changing the number of bump electrodes formed on thesemiconductor chip CHP2 shown in FIG. 1. In this case, the semiconductorchip CHP1 shown in FIG. 1 has bump electrodes BMP throughout the surfacearea thereof, while the semiconductor chip CHP2 shown in FIG. 4 has bumpelectrodes only in portions (area AR1 and area AR3) of the surface areathereof. This suggests that an area of the semiconductor chip CHP2 shownin FIG. 4 in which bump electrodes are placed becomes smaller than anarea of the semiconductor chip CHP1 shown in FIG. 1 in which bumpelectrodes BMP are placed. In order to make equal the number of bumpelectrodes of the semiconductor chip CHP1 shown in FIG. 1 and the numberof bump electrodes of the semiconductor chip CHP2 shown in FIG. 4, thesize of bump electrodes of the semiconductor chip CHP2 shown in FIG. 4must be made smaller than the size of bump electrodes BMP of thesemiconductor chip CHP1 shown in FIG. 1.

The bump electrodes BMP formed on the semiconductor chip CHP1 shown inFIG. 1 are hemispherical bump electrodes BMP made of, for example, asolder. First, a decrease in the size of these bump electrodes BMP isconsidered.

FIG. 10 is a cross-sectional view of the hemispherical bump electrodeBMP made of a solder mounted on the through-hole wiring board THWB aftersize reduction of this bump electrode BMP. As shown in FIG. 10, thethrough-hole wiring board THWB has thereon a terminal TE1 and the bumpelectrode BMP is mounted on this terminal TE1. This bump electrode BMPis formed in an opening portion OP formed in a passivation film (surfaceprotecting film) PAS made of, for example, a silicon nitride film. Thisbump electrode BMP is formed on a pad PD exposed from the openingportion OP. The pad PD is formed on an interlayer insulating film IL.

If the size of this hemispherical bump electrode BMP is reduced, thespace (standoff) A1 between the semiconductor chip and the through-holewiring board THWB also becomes narrow. When the space (standoff) A1between the semiconductor chip and the through-hole wiring board THWB isnarrowed, the filling property of the underfill with which the space isfilled is deteriorated and may form voids (air bubbles) in theunderfill. When the voids are formed in the underfill, water penetratesinto the voids and the water in the voids expands by high-temperaturereflow (for example, from about 240 to 260° C.) during solder mountingon a mounting substrate. As a result, cracks may be caused in theunderfill with the voids as a starting point. Moreover, if the voidsexist adjacent to the bump electrode, water penetrated into the voidsmay cause corrosion at the coupled portion between the bump electrodesBMP and the terminals TE1 and deteriorate the coupling reliabilitybetween the semiconductor chip and the through-hole wiring board THWB.This means that only a reduction in the size of the hemispherical bumpelectrode BMP formed on the semiconductor chip CHP1 shown in FIG. 1 maylead to deterioration in the reliability of the semiconductor devicebecause of the narrowing of the space (standoff) A1 between thesemiconductor chip and the through-hole wiring board THWB.

As a result of investigation, the present inventors have found that thespace (standoff) A1 between the semiconductor chip and the through-holewiring board THWB should be about 20 μm or greater in order to securethe filling property of the underfill. The second related technologytherefore employs not the hemispherical bump electrode BMP as shown inFIG. 10 but a pillared bump electrode PLBMP1 as shown in FIG. 11. FIG.11 is a partial cross-sectional view of a pillared bump electrode PLBMP1mounted on the through-hole wiring board THWB. As shown in FIG. 11, thethrough-hole wiring board THWB has thereon a terminal TE1 and thepillared bump electrode PLBMP1 is mounted on this terminal TE1. Thispillared bump electrode BMP is comprised of a pillar portion made of,for example, copper (Cu) and a coupled portion formed on this pillarportion and made of a solder. In other words, the pillared bumpelectrode PLBMP1 has a first portion made of a solder and a secondportion (copper) having a melting point higher than that of the firstportion (solder). This pillared bump electrode PLBMP1 is formed in anopening portion OP formed in a passivation film (surface protectingfilm) PAS made of, for example, a silicon nitride film. This pillaredbump electrode PLBMP1 is formed on a pad PD exposed from the openingportion OP. The pad PD is formed on an interlayer insulating film IL.

In the pillared bump electrode PLBMP1 having such a configuration, evenif the size of the pillared bump electrode PLBMP1 is reduced, the pillarportion made of copper prevents the space (standoff) A2 between thesemiconductor chip and the through-hole wiring board THWB from becomingsmaller than the space (standoff) A1 at the time when the hemisphericalbump electrode BMP as shown in FIG. 10 is used for coupling (A2>A1).Described specifically, the pillared bump electrode BMP has a firstportion made of a solder and a second portion (copper) having a meltingpoint higher than that of the first portion (solder). In this case, thesemiconductor chip is mounted on the through-hole wiring board THWB andthe pillared bump electrode PLBMP1 of the semiconductor chip and theterminal TE1 on the through-hole wiring board THWB are electricallycoupled to each other by melting the first portion (solder) of thepillared bump electrode PLBMP1 at a high temperature (for example, fromabout 240 to 260° C.). During melting, the second portion (copper) ofthe pillared bump electrode PLBMP1 is not molten even at a hightemperature because the melting point of the second portion is higherthan that of the first portion (solder). Accordingly, the space(standoff) A2 between the semiconductor chip and the through-hole wiringboard THWB does not become smaller than the height of the second portion(copper) of the pillared bump electrode PLBMP1. As described above, thespace (standoff) A2 between the semiconductor chip and the through-holewiring board THWB should be about 20 μm or greater in order to securethe filling property of the underfill, but the height of the secondportion (copper) of the pillared bump electrode PLBMP1 is as high asabout 30 μm so that it fully satisfies the requirement.

When the pillared bump electrode PLBMP1 as shown in FIG. 11 is used, asufficient standoff can be secured even if the size of the pillared bumpelectrode PLBMP1 itself is reduced. This makes it possible to suppressdeterioration in the filling property of the underfill or deteriorationin the coupling reliability between the semiconductor chip and thethrough-hole wiring board THWB. The semiconductor chip CHP2 according tothe second related technology uses, for example, the pillared bumpelectrode PLBMP1 and the pillared bump electrode PLBMP2 as shown inFIGS. 5 and 6.

In the above description, the second portion of the pillared bumpelectrode PLBMP1 made of copper is given as an example but any materialis usable insofar as it is a (metal) material having a melting pointhigher than that of the solder of the first portion. As well as copper,gold (Au) or the like may be used as the material of the second portion.The cost (material cost) can be reduced by using copper as the secondportion compared with using gold. The second portion of the pillaredbump electrode PLBMP1 can be made higher easily by stacking copper byplating.

As the solder of the first portion of the pillared bump electrodePLBMP1, a Sn—Ag-based or Sn—Ag—Cu-based lead-free solder may be used.

The fourth characteristic of the second related technology is thereforethat for example as shown in FIG. 4, the pillared bump electrode PLBMP1(PLBMP2) is formed only in portions (area AR1 and area AR3) of thesurface area of the semiconductor chip CHP2. This makes it possible toconfigure the semiconductor chip CHP2 suited for the through-hole wiringboard THWB having the second and third characteristics. By mounting thesemiconductor chip CHP2 having the fourth characteristic on thethrough-hole wiring board THWB having the second and thirdcharacteristics, a semiconductor device having improved reliability canbe obtained at a reduced cost.

In the second related technology, an example of configuring the bumpelectrode to be formed on the semiconductor CHP2 from the pillared bumpelectrode PLBMP1 (PLBMP2) has been described, but the bump electrode tobe formed on the semiconductor chip CHP2 is not limited to it but may beconfigured from a stud bump electrode.

FIG. 12 is a cross-sectional view showing a stud bump electrode SDBMP1made of, for example, gold mounted on the through-hole wiring boardTHWB. As shown in FIG. 12, the through-hole wiring board THWB hasthereon the terminal TH1 and the stud bump electrode SDBMP1 is mountedon this terminal TE1 and at the same time, a solder S is formed so as tocover the coupled portion between the terminal TE1 and the stud bumpelectrode SDBMP1. The stud bump electrode SDBMP1 is formed in an openingportion OP formed in a passivation film (surface protecting film) PASmade of, for example, a silicon nitride film and the stud bump electrodeSDBMP1 is formed on a pad PD exposed from the opening portion OP. Thispad is formed on an interlayer insulating film IL.

In the stud bump electrode SDBMP1 having such a configuration, even ifthe size of the stud bump electrode SDBMP1 is reduced, a space(standoff) A3 (>A1) between the semiconductor chip and the through-holewiring board THWB can be secured. Also in this example, the stud bumpelectrode SDBMP1 (second portion) is made of a material having a meltingpoint higher than that of the solder S (first portion). When the studbump electrode SDBMP1 (second portion) is electrically coupled to theterminal TE1 on the through-hole wiring board THWB by melting at a hightemperature, the stud bump electrode SDBMP1 (second portion) is notmelted at a high temperature because the melting point of the stud bumpelectrode SDBMP1 (second portion) is higher than that of the solder S(first portion). The height of the space (standoff) A3 between thesemiconductor chip and the through-hole wiring board THWB does notbecome smaller than the height of the stud bump electrode SDBMP1 (secondportion, gold).

As a result, when the stud bump electrode SDBMP1 as shown in FIG. 12 isused, a sufficient standoff can be secured even if the size of the studbump electrode SDBMP1 itself is reduced. This makes it possible tosuppress deterioration in the filling property of the underfill ordeterioration in the coupling reliability between the semiconductor chipand the through-hole wiring board THWB. Thus, the stud bump electrodeSDBMP1 may be used instead of the pillared bump electrode PLBMP1(PLBMP2).

Here, the description has been made using, as an example, the stud bumpelectrode SDBMP1 made of gold, but it may be, for example, a copper studbump electrode formed by using a copper wire.

The semiconductor chip CHP2 according to the second related technologyhaving the fourth characteristic as described above exhibits thefollowing effect. Described specifically, in the semiconductor chip CHP2according to the second related technology, for example as shown in FIG.4, the area AR1 has therein the pillared bump electrode PLBMP1 and atthe same time, the area AR3 sandwiching the area AR2 with the area AR1has the pillared bump electrode PLBMP1. This means that the pillaredbump electrode PLBMP1 formed in the area AR1 and the pillared bumpelectrode PLBMP2 formed in the area AR3 are separated from each otherwith a space corresponding to the area AR2 formed between the area AR1and the area AR3.

Here, the pillared bump electrode PLBMP2 formed in the area AR3 iscoupled to a power source line and has a function of supplying a powersupply potential or a reference potential to an integrated circuitformed inside the semiconductor chip CHP2. Some of the pillared bumpelectrodes PLBMP1 formed in the area AR1 are coupled to a power sourceline and some of them are coupled to a signal line.

When the pillared bump electrode PLBMP1 formed in the area AR1 is placedadjacent to the pillared bump electrode PLBMP2 formed in the area AR3,mutual interference (cross coupling) tends to occur between the pillaredbump electrode PLBMP1 and the pillared bump electrode PLBMP2. Then,noise tends to occur in the power supply voltage or reference voltage tobe supplied to the pillared bump electrode PLBMP2 coupled to the powersource line.

The semiconductor chip CHP2 according to the second related technologyhas, between the area AR1 and the area AR3, the area AR2 having thereinno bump electrodes and this area AR2 serves to increase the distancebetween the pillared bump electrode PLBMP2 formed in the area AR3 andthe pillared bump electrode PLBMP1 in the area AR1. This means that inthe semiconductor chip CHP2 according to the second related technology,cross coupling between the power source line coupled to the pillaredbump electrode PLBMP2 formed in the area AR3 and the signal line coupledto the pillared bump electrode PLBMP1 formed in the area AR1 can besuppressed. As a result, according to the second related technology,stability of a power supply voltage or a reference voltage to be appliedto a power source line coupled to the pillared bump electrode PLBMP2formed in the area AR3 can be enhanced and therefore, an integratedcircuit formed on the semiconductor chip CHP2 has improved operationstability.

Next, the fifth characteristic of the second related technology will bedescribed. For example, as shown in FIG. 6 or FIG. 7, in thesemiconductor device according to the second related technology, thethrough-hole wiring board THWB has, in the area AR2 and area AR3, aplurality of through-holes TH1 and through-holes TH3. This means thatwhen the semiconductor chip CHP2 is mounted on the through-hole wiringboard THWB, there are many through-holes TH1 and through-holes TH3 inareas (area AR2 and area AR3) of the through-hole wiring board THWBwhich overlaps with the semiconductor chip CHP2 in a plan view. Sincethe through-holes TH1 and the through-holes TH3 have, on the inner wallthereof, a plating film made of, for example, copper having a desirablethermal conductivity, heat generated in the semiconductor chip CHP2 canbe released efficiently from these many through-holes TH1 andthrough-holes TH3 formed immediately below the semiconductor chip CHP2.The semiconductor device according to the second related technologytherefore has improved release characteristics of heat generated in thesemiconductor chip CHP2. As a result, a heat sink HS shown in FIG. 2 maybe omitted. If the heat sink HS becomes unnecessary, the material costcan be reduced correspondingly.

As described above, the second related technology has at least the firstto fifth characteristics. The following is the outline of these first tofifth characteristics.

(1) The first characteristic of the second related technology is that asa wiring board having the semiconductor chip CHP2 thereon, thethrough-hole wiring board THWB as shown in FIG. 6 is used without usingthe buildup wiring board BPWB as shown in FIG. 3. In the second relatedtechnology, since the through-hole wiring board THWB comprised only ofthe core layer CRL is used, it becomes unnecessary to consider thedifference in thermal expansion coefficient between the buildup layerBPL1 (BPL2) and the core layer CRL. Moreover, the through-hole wiringboard does not have the buildup layer BPL1 (BPL2) so that it becomesunnecessary to consider the electrical disconnection of a microvia VAformed in the buildup layer BPL1 (BPL2). As a result, the second relatedtechnology makes it possible to provide a semiconductor device havingimproved reliability while reducing a manufacturing cost.

(2) The second characteristic of the second related technology is thatfor example as shown in FIG. 6, a wiring layout is devised whileseparating the through-hole TH1 formation area, the through-hole TH2formation area, and the terminal TE1 formation area from each other.More specifically, as shown in FIG. 6, a plurality of through-holes TH2is provided in the area AR0 of the through-hole wiring board THWB and aplurality of terminals TE1 is provided in the area AR1 of thethrough-hole wiring board THWB. And, a plurality of through-holes TH1 isprovided in the area AR2 of the through-hole wiring board THWB. In thesecond related technology, as shown in FIG. 7, the terminals TE1 to beelectrically coupled to the through-holes TH2 formed in the area AR0 isplaced on the side near the AR0 and the terminals TE1 to be electricallycoupled to the through-holes TH1 formed in the area AR2 is placed on theside near the area AR2. According to this wiring layout of the secondrelated technology, it becomes unnecessary to drag wirings in the areaAR1 and becomes possible to efficiently couple the through-holes TH1 andthe terminals TE1 to each other and efficiently couple the through-holesTH2 and the terminals TE1 to each other while separating thethrough-hole TH1 formation area, the through-hole TH2 formation area,and the terminal TE1 formation area from each other.

(3) The third characteristic of the second related technology is that asshown in FIG. 6, a plurality of through-holes TH3 and a plurality ofterminals TE2 are formed in the area AR3 and wirings for coupling thethrough-holes TH3 and the terminals TE2 formed in this area AR3 arecomprised only of, for example, a power supply line for supplying apower supply potential or a GND line for supplying a reference potential(GND potential). Such a configuration in the second related technologymakes it possible not only to supply the semiconductor chip CHP2 with apower supply potential and a reference potential from some of theterminals TE1 formed in the area AR1 but also to supply thesemiconductor chip CHP2 with a power supply potential and a referencepotential from the terminals TE2 formed in the area AR3. In short, apower supply potential and a reference potential can be supplied notonly from the area AR1 of the semiconductor chip CHP2 but also from thearea AR3 so that a power supply voltage drop (IR drop) in thesemiconductor chip CHP2 can be reduced.

(4) The fourth characteristic of the second related technology is thatfor example as shown in FIG. 4, the pillared bump electrode PLBMP1(PLBMP2) is formed only in portions (the area AR1 and the area AR3) ofthe surface area of the semiconductor chip CHP2. This makes it possibleto provide a sufficient standoff even if the size of the pillared bumpelectrode PLBMP1 (PLBMP2) itself is reduced so that deterioration in thefilling property of the underfill or deterioration in the couplingreliability between the semiconductor chip and the through-hole wiringboard THWB can be suppressed. Moreover, a semiconductor chip CHP2 suitedfor the through-hole wiring board THWB equipped with the second andthird characteristics can be configured. Moreover, according to thefourth characteristic of the second related technology, the area AR1 andthe area AR3 have therebetween the area AR2 having no bump electrodeformed therein and due to the presence of this area AR2, the distancebetween the pillared bump electrode PLBMP2 formed in the area AR3 andthe pillared bump electrode PLBMP1 formed in the area AR1 can bewidened. As a result, according to the second related technology, crosscoupling between a power source line coupled to the pillared bumpelectrode PLBMP2 formed in the area AR3 and a signal line coupled to thepillared bump electrode PLBMP1 formed in the area AR1 can be suppressed.

The second related technology therefore makes it possible to enhance thestability of a power supply voltage or a reference voltage to be appliedto a power supply line coupled to the pillared bump electrode PLBMP2formed in the area AR3 and therefore to improve the operation stabilityof the integrated circuit formed in the semiconductor chip CHP2.

(5) The fifth characteristic of the second related technology is thatwhen the semiconductor chip CHP2 is mounted on the through-hole wiringboard THWB, many through-holes TH1 and through-holes TH3 are present inthe areas (area AR2 and area AR3) of the through-hole wiring board THWBoverlapping with the semiconductor chip CHP2 in a plan view. Thesemiconductor device according to the second related technology,therefore, has improved release characteristics of heat generated in thesemiconductor chip CHP2.

<New Problem of Second Related Technology Found by Present Inventors>

The present inventors have found a new problem of the second relatedtechnology to be investigated. It will next be described. FIG. 13 is aplan view of the through-hole wiring board THWB according to the secondrelated technology when viewed from the surface side (main surface side,upper surface side). As shown in FIG. 13, the through-hole wiring boardTHWB according to the second related technology is rectangular and has aplurality of through-holes TH2 along the peripheral area of the wiringboard. In FIG. 13, a plurality of through-holes TH2 is formed in tworows and a rectangular semiconductor chip CHP2 is mounted in a centerarea present on the inner side of the peripheral area. FIG. 13 does notshow the semiconductor chip CHP2 itself and a chip mounting area inwhich the semiconductor chip CHP2 is to be mounted is shown by a brokenline. It has been found from this FIG. 13 that the through-holes TH2formed in the peripheral area of the through-hole wiring board THWB areplaced so as not to overlap with the semiconductor chip CHP2 in a planview.

Next, as shown in FIG. 13, a plurality of terminals TE1 is formed insidethe chip mounting area in which the semiconductor chip CHP2 is mounted.More specifically, as shown in FIG. 13, a plurality of terminals TE1 isformed in two rows along a virtual line defining the chip mounting area.A plurality of through-holes TH1 is formed in an area inside theseterminals TE1; a plurality of through-holes TH3 is formed in an areainside the through-holes TH1; and a plurality of terminals TE2 is formedin an area inside the through-holes TH3.

The surface side of the through-hole wiring board THWB in the secondrelated technology has such a configuration as described above. The planconfiguration of the back surface side (lower surface side) of thethrough-hole wiring board THWB will next be described. FIG. 14 is a planview of the through-hole wiring board THWB according to the secondrelated technology when viewed from the back surface side. As shown inFIG. 14, a rectangular through-hole wiring board THWB has, in an outerarea therein, a plurality of solder balls SB2. The solder balls SB2 areplaced, for example, in two rows as shown in FIG. 14 and these solderballs SB3 are electrically coupled to the through-holes TH2. The solderballs SB2 and the through-holes TH2 are placed so as not to overlap witheach other in a plan view. These solder balls SB2 are a mixture ofsolder balls to which a power supply potential, a reference potential(GND potential), and a signal voltage are applied, respectively.Accordingly, lands having the solder balls SB2 thereon are a mixture oflands to which a power supply potential, a reference potential, and asignal voltage are applied, respectively.

The area having therein the solder balls SB2 embraces, in the area, achip mounting area. FIG. 14 shows the chip mounting area present on thesurface side by a broken line. Moreover, in the through-hole wiringboard THWB according to the second related technology, this chipmounting area has, inside thereof, a plurality of solder balls SB1.These solder balls SB1 do not include those supplied with a signalvoltage but include those supplied with a power supply potential or areference potential. This means that the lands having thereon the solderballs SB1 include only those supplied with a power supply potential or areference potential.

What is important here is that in the through-hole wiring board THWBaccording to the second related technology, solder balls SB1 should beplaced so as to prevent the solder balls SB1 from overlapping with thethrough-holes TH1 and the through-holes TH3 in a plan view. Since thethrough-holes TH1 and the through-hole TH3 are formed densely in anarrow area overlapping with the chip mounting area in a plan view, thenumber of the solder balls SB1 to be placed in an area overlapping withthe chip mounting area in a plan view is limited.

In the through-hole wiring board THWB according to the second relatedtechnology, it is necessary to (1) place the through-holes TH1 and thethrough-holes TH3 densely in a narrow area which overlaps with the chipmounting area in a plan view and (2) place the solder balls SB1 whileavoiding the through-holes TH1 and the through-holes TH3. Thethrough-hole wiring board THWB according to the second relatedtechnology is therefore characterized by that the number of the solderballs SB1 placed in an area overlapping with the chip mounting area in aplan view becomes smaller. This means that the number of the solderballs SBG1 placed in an inner area which overlaps with the chip mountingarea in a plan view is smaller than the number of the solder balls SB2placed in an outer area which does not overlap with the chip mountingarea in a plan view. As a result, the number of the lands having thereonthe solder balls SB1 is smaller than the number of the lands havingthereon the solder balls SB2.

The present inventors have found newly that in the semiconductor deviceaccording to the second related technology, a decrease in the number ofthe solder balls SB1 formed in the area of the back surface of thethrough-hole wiring board THWB overlapping with the chip mounting areain a plan view may lessen the improvement in the reliability of thesemiconductor device.

More specifically, the semiconductor device including the through-holewiring board THWB having thereon the semiconductor chip CHP2 is coupledto a mounting substrate via the solder balls SB1 or solder ball SB2.This means that the through-hole wiring board THWB is mounted on themounting substrate via a plurality of solder balls SB1 and solder ballsSB2. The reliability test (temperature cycling test after mounting)after mounting of the semiconductor device on the mounting substrate hasrevealed the fracture and separation of the solder balls SB1 placed inan area of the back surface of the through-hole wiring board THWBoverlapping with the mounting area of the semiconductor chip CHP2 in aplan view, which will be described hereinafter.

FIG. 15 is a schematic view showing the simulation of the temperaturecycling test while mounting the through-hole wiring board THWB havingthereon the semiconductor chip CHP2 on the mounting substrate LS. InFIG. 15, the through-hole wiring board THWB has thereon thesemiconductor chip CHP2 and this through-hole wiring board THWB and themounting substrate LS are coupled to each other via the solder balls SB1and the solder balls SB2.

When the semiconductor device having such a configuration is subjectedto a temperature cycling test by changing the temperature, for example,within a range of from −40° C. to 125° C., the semiconductor chip CHP2,the through-hole wiring board THWB, and the mounting substrate LS aredeformed as a result of repetition of thermal expansion and thermalshrinkage (refer to FIG. 15). In particular, a large stress occursbetween the semiconductor chip CHP2 comprised mainly of silicon and thethrough-hole wiring board THWB comprised mainly of a resin due to adifference in thermal expansion coefficient between silicon and theresin. This means that as shown in FIG. 15, a larger stress is appliedto the vicinity of the chip mounting area of the through-hole wiringboard THWB than to another area.

In the second related technology, since the through-hole wiring boardTHWB and the mounting substrate LS are coupled to each other via thesolder balls SB1 and the solder balls SB2, a stress due to thedeformation of the through-hole wiring board THWB and the mountingsubstrate LS is applied to the solder balls SB1 and the solder ballsSB2.

First, with regards to the solder balls SB2, the solder balls SB2 areformed in an area of the through-hole wiring board THWB outside the chipmounting area in a plan view. This means that the solder balls SB2 areplaced not in the chip mounting area where a large stress is applied butin an outer area where a stress is relatively small. Moreover, thenumber of the solder balls SB2 is large so that a stress applied to onesolder ball SB2 is small. It is therefore presumed that the fracture andseparation of the solder balls SB2 due to this stress do not becomeobvious.

Next, with regards to the solder balls SB1, the solder balls SB1 areformed in an area of the through-hole wiring board THWB overlapping withthe chip mounting area in a plan view. This means that the solder ballsSB1 are placed in an area embraced in the chip mounting area where astress becomes large. Moreover, in the through-hole wiring board THWBaccording to the second related technology, for example as shown in FIG.14, the number of the solder balls SB1 formed in an area overlappingwith the chip mounting area in a plan view is limited to be small. As aresult, in the second related technology, a stress applied to one solderball SB1 becomes large and the fracture and separation of the solderballs SB1 due to the stress tend to become obvious. This means that thesecond related technology has the following points: (1) a stress becomeslarge in an area of the through-hole wiring board THWB overlapping withthe chip mounting area in a plan view due to a difference in thermalexpansion coefficient between the semiconductor chip CHP2 and thethrough-hole wiring board THWB; and (2) the number of the solder ballsSB1 placed in an area overlapping with the chip mounting area in a planview becomes small. In the second related technology, therefore,fracture and separation of the solder balls SB1 from the through-holewiring board THWB tend to occur. In short, in the through-hole wiringboard THWB in the second related technology, due to a decrease in thenumber of the solder balls SB1 formed in an area overlapping with thechip mounting area in a plan view, the fracture and separation of thesolder balls SB1 tend to become evident.

More specifically, FIG. 16 shows the fracture and separation of thesolder ball SB1 which couples the through-hole wiring board THWB to themounting substrate LS. As is apparent from FIG. 16, the solder ball SB1is broken and separated from the through-hole wiring board THWB. Inparticular, in the second related technology, SMD is employed as theconfiguration mode of the land so that fracture and separation of thesolder ball SB1 becomes obvious. Such facture and separation of thesolder ball SB1 cause a failure of a semiconductor device. As a result,the semiconductor device thus obtained has deteriorated reliability.

As described above, in the second related technology, fracture andseparation of the solder ball SB1 from the through-hole wiring boardTHWB becomes a problem. The solder ball SB1 is mounted on the landformed on the back surface of the through-hole wiring board THWB andthereby the solder ball SB1 is coupled to the through-hole wiring boardTHWB. The fracture and separation of the solder ball SB1 from thethrough-hole wiring board THWB occur in a boundary area between the landand the solder ball SB1 so that it is important to improve the bondstrength between the land and the solder ball SB1. In the second relatedtechnology, a structure called SMD (Solder Mask Defined) is employed asthe structure of the land so that particularly the fracture andseparation of the solder ball SB1 from the land become obvious, whichwill hereinafter be described.

FIG. 17 shows a land LND1 having an SMD structure formed on the backsurface of the through-hole wiring board THWB. FIG. 17 is an enlargedview of one land LND1 formed on the back surface of the through-holewiring board THWB and one through-hole TH1. As shown in FIG. 17, theback surface of the through-hole wiring board is covered with the solderresist SR and this solder resist SR has therein an opening portion OP1.From this opening portion OP1, the land LND1 is exposed. The land LND1shown in FIG. 17 is greater than the opening portion OP1 formed in thesolder resist SR and the land LND1 is covered, at the peripheral areathereof, with the solder resist SR. Described specifically, the landLND1 and the opening portion OP1 each have a circular shape and thediameter of the land LND1 is greater than that of the opening portionOP1. Such a configuration mode of the land LND1 is called “SMD” (SolderMask Defined). In short, in SMD, the diameter of the land LND1 isgreater than that of the opening portion OP1. Accordingly, in SMD, theentirety of the land LND1 is not exposed from the opening portion OP1formed in the solder resist SR but the center area of the land LND1 isexposed and the peripheral area of the land LND1 is covered with thesolder resist SR. In other words, SMD is a configuration mode in whichthe diameter of the land LND1 is greater than the diameter of theopening portion OP1 formed in the solder resist SR and at the same time,the opening portion OP1 is embraced in the land LND1 and a portion ofthe land LND1 is exposed.

To the land LND1, a wiring L1 is coupled and this wiring L1 is coupledto the through-hole TH1. More specifically, the through-hole wiringboard THWB has, on the back surface thereof, a foot pattern FP1embracing the through-hole TH1 so as to overlap with the through-holeTH1 in a plan view and this foot pattern FP1 is coupled to the land LND1via the wiring L1. The through-hole TH1 and the foot pattern FP1, andthe wiring L1 are covered with the solder resist SR. This means that inSMD, only a portion of the land LND1 is exposed from the opening portionOP1 and the wiring L1, the foot pattern FP1, and the through-hole TH1coupled to the land LND1 are all covered with the solder resist SR.

FIG. 18 is a cross-sectional view taken along a line A-A of FIG. 17. Asshown in FIG. 18, the through-hole wiring board THWB has therein thethrough-hole TH1 and this through-hole TH1 has, on the side surfacethereof, a conductive film CF2. The foot pattern FP1, the wiring L1, andthe land LND1 are integrated with each other so that they areelectrically coupled to the through-hole TH1 having the conductive filmCF2. The foot pattern FP1, entirety of the wiring L1, and a portion(peripheral area) of the land LND1 which have been integrated with eachother are covered with the solder resist SR, while a portion (centerarea) of the land LND1 is exposed from the opening portion OP1 formed inthe solder resist SR. Such a configuration mode of the land LND1 is SMD.

FIG. 19 is a cross-sectional view showing the solder ball SB1 mounted onthe land LND1 having an SMD structure. As shown in FIG. 19, thethrough-hole wiring board THWB has, on the back surface thereof, theland LND1 and this through-hole wiring board THWB has, on the backsurface including the peripheral area of this land LND1, the solderresist SR. In other words, the center area of the land LND1 is exposedfrom the opening portion OP1 provided in the solder resist SR. The landLND1 exposed from the opening portion OP1 provided in the solder resistSR has, on the bottom surface thereof, the solder ball SB1.

In the second related technology, the above-mentioned SMD is employed asa configuration mode of the land LND1 formed on the back surface of thethrough-hole wiring board THWB, because in SMD, the peripheral area ofthe land LND1 is covered with the solder resist SR, the adhesion betweenthe through-hole wiring board THWB and the land LND1 can be improved. Inother words, in SMD, easy separation of the land LND1 from thethrough-hole wiring board THWB is prevented so that it is employed as aconfiguration mode of the land LND1 formed on the through-hole wiringboard THWB.

SMD has however the following disadvantage. Described specifically, inSMD, adhesive force between the land LND1 and the solder ball SB1decreases in spite of the improvement in the adhesion between thethrough-hole wiring board THWB and the land LND1, because in SMD, theland LND1 is in contact with the solder ball SB1 only at the bottomsurface of the land exposed from the opening portion OP1. As a result,when SMD is employed as a configuration mode of the land LND1 placed inan area overlapping with the chip mounting area in a plan view, thefracture and separation of the solder ball SB1 from the land LND1becomes obvious.

For example, the through-hole wiring board THWB according to the secondrelated technology has the following points: (1) a stress becomes largein an area of the through-hole wiring board THWB overlapping with thechip mounting area in a plan view due to a difference in thermalexpansion coefficient between the semiconductor chip CHP2 and thethrough-hole wiring board THWB and (2) the number of the solder ballsSB1 placed in an area overlapping with the chip mounting area in a planview is limited and becomes small. A stress applied to a boundary areabetween the solder ball SB1 and the land LND1 placed in an areaoverlapping with the chip mounting area in a plan view thereforeincreases. If SMD in which adhesive force is weak between the land LND1and the solder ball SB1 is employed, fracture and separation of thebolder ball SB1 from the land LND1 become obvious.

Characteristics of Semiconductor Device in Embodiment

In this embodiment, some measures are devised to prevent fracture andseparation, from the through-hole wiring board THWB, of the solder ballSB1 placed in an area overlapping with the chip mounting area in a planview. A description will hereinafter be made on these measures. Inparticular, in the present embodiment, the bond strength between thesolder ball SB1 and the land is improved by paying attention to thestructure of the land to be coupled to the solder ball SB1 and devisingthis structure of the land.

More specifically, in the present embodiment, not SMD but NSMD isemployed as the configuration mode of the land LND1. This makes itpossible to improve the adhesive force between the land LND1 and thesolder ball SB1, thereby preventing the fracture and separation of thesolder ball SB1 from the land LND1. A description will hereinafter bemade on NSMD.

FIG. 20 shows the land LND1 formed on the back surface of thethrough-hole wiring board THWB and having an NSMD structure. FIG. 20 isan enlarged view of one land LND1 formed on the back surface of thethrough-hole wiring board THWB and one through-hole TH1. As shown inFIG. 20, the back surface of the through-hole wiring board THWB iscovered with the solder resist SR and this solder resist SR has thereinan opening portion OP2. The land LND1 is placed so as to be embracedwith this opening portion OP2. This means that the opening portion OP2and the land LND1 have a circular shape but the diameter of the openingportion OP2 is greater than the diameter of the land LND1. Such aconfiguration mode of the land LND1 is called “NSMD” (Non Solder MaskDefined).

NSMD is a configuration mode in which the diameter of the land LND1 issmaller than that of the opening portion OP2 formed in the solder resistSR and at the same time, the entirety of the land LND1 is exposed whilethe land LND1 is embraced in the opening portion OP2. A wiring L1 iscoupled to the land LND1 exposed from the opening portion OP2 and thiswiring L1 is coupled to the through-hole TH1. More specifically, a footpattern FP1 embracing therein the through-hole TH1 is formed on the backsurface of the through-hole wiring board THWB so as to overlap with thethrough-hole TH1 in a plan view. This foot pattern FP1 and the land LND1are coupled to each other via the wiring L1. The through-hole TH1, thefoot pattern FP1, and a portion of the wiring L1 are covered with thesolder resist SR.

On the other hand, since the land LND1 is formed so as to be embraced inthe opening portion OP2 formed in the solder resist SR, the land LND1and a portion of the wiring L1 coupled to the land LND1 are exposed fromthe opening portion OP2. The term “land LND1” as used herein means acircular pattern as shown in FIG. 20 and it does not include the wiringL1 coupled to the circular pattern. Accordingly, the entirety of theland LND1 (circular pattern) is embraced in the opening portion OP2provided in the solder resist SR as shown in FIG. 20, which is acharacteristic of NSMD.

FIG. 21 is a cross-sectional view taken along a line A-A of FIG. 20. Asshown in FIG. 21, the through-hole wiring board THWB has therein thethrough-hole TH1 and this through-hole TH1 has, on the side surfacethereof, a conductive film CF2. The foot pattern FP1, the wiring L1, andthe land LND1 are integrated with each other so as to be electricallycoupled to the upper portion of the through-hole TH1 having theconductive film CF2. The foot pattern FP1 and a portion of the wiring L1integrated with each other is covered with the solder resist SR, while aportion of the wiring L1 and the land LND1 are exposed from the openingportion OP2 formed in the solder resist SR. Such a configuration mode ofthe land LND1 is NSMD.

FIG. 22 is a cross-sectional view showing a solder ball SB1 mounted onthe land LND1 having an NSMD structure. As shown in FIG. 22, thethrough-hole wiring board THWB has, on the back surface thereof, a landLND1 and the through-hole wiring board THWB has, on the back surfacethereof, a solder resist SR. In NSMD, the entirety of the land LND1 isexposed while being embraced in an opening portion OP2 provided in thesolder resist SR. The solder ball SB1 is mounted so as to be broughtinto contact with the bottom surface and side surface of the land LND1exposed from the opening portion OP1. In NSMD, the land LND1 has abottom surface which faces the same direction with the back surface ofthe through-hole wiring board THWB, an upper surface opposite to thebottom surface, and a side surface located between the bottom surfaceand the upper surface in the thickness direction of the through-holewiring board THWB. In a plan view, a solder is in contact with thebottom surface and the side surface of the land LND1 in a plan view.

Thus, there are two configuration modes of the land LND1 formed on theback surface of the through-hole wiring board THWB and they are NSMD andSMD. From the standpoint of improving the adhesion between the land LND1and the solder ball SB1, NSMD is superior to SMD, because of thefollowing reason. In SMD, since the opening portion OP1 is embraced inthe land LND1, an area of the land LND1 exposed from the opening portionOP1 is only the bottom surface of the land LND1 (refer to FIG. 19).

On the other hand, in NSMD, the entirety of the land LND1 is exposedfrom the opening portion OP2 so that not only the bottom surface of theland LND1 but also its side surface is exposed from the opening portionOP2 (refer to FIG. 22). Described specifically, the land LND1 is madeof, for example, a metal film. In SMD, only the surface of the metalfilm is exposed, while in NSMD, not only the surface of the metal filmbut also the side surface of the metal film in the film thicknessdirection is exposed. Compared with SMD, the exposed area of NSMD istherefore greater and the adhesion area of the solder ball SB1 mountedon the land LND1 becomes greater.

This means that adhesion of the land with the solder ball SB1 is betterin NSMD than in SMD. In consideration of the improvement in bondstrength between the land LND1 and the solder ball SB1, NSMD is superiorto SMD.

The first characteristic of the present embodiment is that NSMD isemployed as the configuration mode of the land LND1 placed in an area ofthe back surface of the through-hole wiring board THWB overlapping withthe chip mounting area in a plan view. When NSMD is employed, the landLND1 is brought into contact with the solder ball SB1 not only at thebottom surface of the land but also the side surface thereof, making itpossible to improve the bond strength between the land LND1 and thesolder ball SB1. As a result, according to the present embodiment, thefracture and separation of the solder ball SB1 from the land LND1 caneffectively be suppressed.

For example, even in the through-hole wiring board THWB of the presentembodiment, (1) a stress becomes large in an area of the through-holewiring board THWB overlapping with the chip mounting area in a plan viewdue to a difference in thermal expansion coefficient between thesemiconductor chip CHP2 and the through-hole wiring board THWB and (2)the number of the solder balls SB1 placed in an area overlapping withthe chip mounting area in a plan view becomes small. This increases astress applied to a boundary area between the solder ball SB1 and theland LND1 placed in an area overlapping with the chip mounting area in aplan view. When SMD in which the adhesive force between the land LND1and the solder ball SB1 is weak, the fracture and separation of thesolder ball SB1 from the land LND1 tend to occur.

In this point, in the present embodiment, NSMD is employed as aconfiguration mode of the land LND1 placed in an area of the backsurface of the through-hole wiring board THWB overlapping with the chipmounting area in a plan view. Using the land LND1 having an NSMDstructure makes it possible to improve the bond strength between theland LND1 and the solder ball SB1 so that even if the through-holewiring board THWB has the above-mentioned problem, the fracture andseparation of the solder ball SB1 from the land LND1 can effectively besuppressed according to the present embodiment.

The present embodiment is characterized by using NSMD as theconfiguration mode of the land LND1, but the land LND1 itself is notcovered with the solder resist SR in this NSMD. Compared with SMD inwhich the peripheral area of the land LND1 is covered with the solderresist SR, the adhesive force between the through-hole wiring board THWBand the land LND1 is presumed to be weaker. This means that in NSMD, theadhesive force between the land LND1 and the solder ball SB1 can be madegreater than that in SMD, while the adhesive force between thethrough-hole wiring board THWB and the land LND1 becomes smaller thanthat in SMD. There is a fear that the land LND1 is separated from thethrough-hole wiring board THWB in NSMD, but now it becomes lessnecessary to fear it, because a technology of forming an adhesive layercalled primer has recently been established for bonding of thethrough-hole wiring board THWB to the land LND1. Even in NSMD,sufficient bond strength can be secured between the through-hole wiringboard THWB and the land LND1 so that the above-mentioned fear does notbecome obvious.

It is rather necessary to improve the adhesive force between the landLND1 and the solder ball SB1. In the reliability test (temperaturecycling test after mounting) after the semiconductor device is mountedon a mounting substrate, the solder ball SB1 placed in an area of theback surface of the through-hole wiring board THWB overlapping with amounting area of the semiconductor chip CHP2 in a plan view is brokenand separated from the land LND1. It is therefore important to improvethe adhesive force between the land LND1 and the solder ball SB1.

Thus, the first characteristic of the present embodiment is that NSMD isemployed as the configuration mode of the land LND1 placed in at leastan area of the back surface of the through-hole wiring board THWBoverlapping with the chip mounting area in a plan view.

The second characteristic of the present embodiment is that the size ofthe solder ball SB1 is made larger. More specifically, the solder ballSB1 with a diameter of 0.45 mm is used when SMD is employed. When NSMDis employed as in the present embodiment, the solder ball SB1 with adiameter of 0.50 mm is used In this case, since the volume of the solderball SB1 itself becomes large, a stress to be applied to a joint betweenthe solder ball and the land LND1 can be relaxed with the deformation ofthe solder ball SB1 itself even if a temperature cycling test aftermounting is performed. As a result, the fracture and separation of thesolder ball SB1 from the land LND1 can be suppressed.

The third characteristic of the present embodiment is that the thicknessof the through-hole wiring board THWB is greater than the thickness ofthe semiconductor chip CHP2. More specifically, the through-hole wiringboard THWB includes a core material (core layer CRL) (refer to FIG. 6)and the thickness of the core material is 1.2 times or more but not morethan 2 times the thickness of the semiconductor chip CHP2. This makes itpossible to prevent warpage of the through-hole wiring board THWB. Whenthe temperature cycling test after mounting is conducted, there occurswarpage (deformation) of the through-hole wiring board THWB, dependingon a difference in thermal expansion coefficient, because thethrough-hole wiring board THWB and the semiconductor chip CHP2 differfrom each other in thermal expansion coefficient. The warpage of thethrough-hole wiring board THWB leads to a stress to a joint (boundaryarea) between the land LND1 and the solder ball SB1. In particular, withan increase in the warpage of the through-hole wiring board THWB, thestress applied to the joint between the land LND1 and the solder ballSB1 becomes greater. In order to suppress the stress to be added to thejoint between the land LND1 and the solder ball SB1, it is desired toreduce the warpage of the through-hole wiring board THWB.

In the present embodiment, the rigidity of the through-hole wiring boardTHWB is enhanced, for example, by making the thickness of thethrough-hole wiring board THWB greater than the thickness of thesemiconductor chip CHP2 so that the thickness of the core materialconfiguring the through-hole wiring board THWB becomes 1.2 times or morebut not more than 2 times the thickness of the semiconductor chip CHP2.The warpage of the through-hole wiring board THWB due to a difference inthermal expansion coefficient between the through-hole wiring board THWBand the semiconductor chip CHP2 can be reduced because the through-holewiring board THWB has high rigidity. As a result, the present embodimentmakes it possible to suppress a stress to be added to the joint betweenthe land LND1 and the solder ball SB1, thereby preventing the fractureand separation of the solder ball SB1 from the land LND1.

The present embodiment has the first to third characteristics asdescribed above and these first to third characteristics will next besummarized as follows.

(1) In the present embodiment, NSMD is employed as the configurationmode of the land LND1 placed in at least an area of the back surface ofthe through-hole wiring board THWB overlapping with the chip mountingarea in a plan view. In NSMD, the land LND1 is brought into contact withthe solder ball SB1 not only at the bottom surface but also at the sidesurface so that the bond strength between the land LND1 and the solderball SB1 can be improved.

(2) In the present embodiment, the size of the solder ball SB1 to bemounted on the land LND1 having an NSMD structure employed in thepresent embodiment is made greater than the size of the solder ball SB1to be mounted on the land LND1 having an SMD structure. This makes itpossible to increase the volume of the solder ball SB1 itself, therebyrelaxing the stress at the joint between the land LND1 and the solderball SB1.

(3) In the present embodiment, the thickness of the through-hole wiringboard THWB is made greater than the thickness of semiconductor chip CHP2so as to make the thickness of the core material configuring thethrough-hole wiring board THWB 1.2 times or more but not more than 2times the thickness of the semiconductor chip CHP2. This makes itpossible to enhance the rigidity of the through-hole wiring board THWB.As a result, even if temperature cycling is applied, warpage of thethrough-hole wiring board THWB can be reduced.

In the present embodiment, due to the synergistic effect of these firstto third characteristics, the fracture and separation of the solder ballSB1 from the land LND1 can be suppressed effectively. The semiconductordevice obtained according to the present embodiment has therefore hasimproved reliability. It is to be noted that the semiconductor deviceaccording to the present embodiment also has characteristics describedabove in the second related technology.

Specific Application Mode of Embodiment

Various application modes which have actualized the technical concept ofthe present embodiment will next be described. FIG. 23 is a plan viewshowing the configuration of a through-hole wiring board THWB accordingto the present embodiment. FIG. 23 shows the back surface of thethrough-hole wiring board THWB. In FIG. 23, the rectangular through-holewiring board THWB has, in an outer area thereof, a plurality of solderballs SB2. A chip mounting area is formed so as to be embraced in theouter area having therein a plurality of solder balls SB2. Since asemiconductor chip CHP2 is mounted on the surface of the through-holewiring board THWB, it is not illustrated in the drawing of thethrough-hole wiring board THWB of FIG. 23. In FIG. 23, however, an area(which will be sometimes called “chip mounting area” herein) overlappingwith the chip mounting area in a plan view is indicated by a brokenline. Next, in FIG. 23, the solder ball SB1 is placed in an inner areaof the chip mounting area. The term “outer area” means an area outsidethe chip mounting area and the term “inner area” means an area insidethe chip mounting area.

In FIG. 23, a plurality of solder balls SB1 has first external balls EXBplaced at the outermost periphery of the plurality of solder balls SB1,while a plurality of solder balls SB2 has second internal balls INBplaced at the innermost periphery of the plurality of solder balls SB2and adjacent to the first external balls EXB. The distance between thefirst external balls EXB and the second internal balls INB becomes thelargest among the distances between the solder balls adjacent to eachother. The semiconductor chip is mounted on the surface (main surface,upper surface) of the through-hole wiring board THWB so that the outeredge portion (broken line) of the semiconductor chip is placed betweenthe first external balls EXB and the second internal balls INB in a planview.

Next, a description will be made while paying attention to a land. Theland corresponding to the solder ball SB1 is called “first land” and theland corresponding to the solder ball SB2 is called “second land”. Inthis case, a plurality of first lands has first external lands placed atthe outermost periphery of the plurality of first lands and a pluralityof second lands has second lands placed at the innermost periphery ofthe plurality of second lands and adjacent to the first external lands.The distance between the first external lands and the second internallands is the largest among the distances between the lands adjacent toeach other. The semiconductor chip is mounted on the surface (mainsurface, upper surface) of the through-hole wiring board THWB so thatthe outer peripheral portion (broken line) of the semiconductor chip isplaced between the first external land and the second internal land in aplan view.

In FIG. 23, the characteristic of the present embodiment is that thelands placed in the inner area of the chip mounting area and having thesolder balls SB1 thereon have an NSMD structure. This means that in FIG.23, the lands placed on the back surface of the through-hole wiringboard THWB so as to overlap with the chip mounting area in a plan viewand having the solder ball SB1 thereon have an NSMD structure. Morespecifically, in FIG. 23, the lands corresponding to the dotted solderball SB1 have an NSMD structure. Thus, according to the presentembodiment, the lands placed in at least an area of the back surface ofthe through-hole wiring board THWB overlapping with the chip mountingarea in a plan view uses NSMD as its configuration mode. When NSMD isemployed, the lands are brought into contact with the solder ball SB1not only at the bottom surface but also the side surface of the lands,making it possible to improve the bond strength between the lands andthe solder balls SB1.

FIG. 24 shows a portion of the semiconductor device according to thepresent embodiment and it shows an internal structure of thethrough-hole wiring board THWB. In the present embodiment, as shown inFIG. 24, the through-hole wiring board THWB is made of a core layer CRLcontaining a glass cloth. This through-hole wiring board THWB hastherein through-holes TH1, TH2, and TH3 which penetrate from the surface(upper surface) to the back surface (lower surface) of the through-holewiring board THWB. The through-hole wiring board THWB has, on thesurface thereof, a solder resist SR (first solder resist) and with thissolder resist SR, the through-holes TH1, TH2, and TH3 is filled. Thesolder resist SR has therein an opening portion and from this openingportion, a plurality of terminals TE1 and a plurality of terminals TE2are exposed.

For example, the through-hole wiring board THWB has, on the surfacethereof, a plurality of terminals TE1 and some of these terminals TE1are electrically coupled to the through-hole TH1 on the surface of thethrough-hole wiring board THWB, while the other terminals TE1 areelectrically coupled to the through-hole TH2 on the surface of thethrough-hole wiring board THWB. In addition, the through-hole wiringboard THWB has, on the surface thereof, a plurality of terminals TE2 andthese terminals TE2 are electrically coupled to the through-hole TH3 onthe surface of the through-hole wiring board THWB. At this time, thethrough-hole wiring board THWB has thereon a semiconductor chip CHP2 anda pillared bump electrode PLBMP1 formed on the semiconductor chip CHP2is electrically coupled to the terminal TE1 formed on the surface of thethrough-hole wiring board THWB. Similarly, a pillared bump electrodePLBMP2 formed on the semiconductor chip CHP2 is electrically coupled tothe terminal TE2 formed on the surface of the through-hole wiring boardTHWB. This means that the through-hole wiring board THWB has only onewiring layer on each of the surface and back surface of the core layerCRL. In the semiconductor device according to the second relatedtechnology, a pillared bump electrode is electrically coupled to thiswiring layer directly.

On the other hand, the through-hole wiring board THWB has, on the backsurface thereof, a solder resist SR (second solder resist). The solderresist SR has therein an opening portion and from this opening portion,a plurality of lands LND1 (back surface terminals) and a plurality oflands LND2 are exposed. These lands LND1 are electrically coupled to thethrough-holes TH1 and TH3 on the back surface of the through-hole wiringboard THWB and the lands LND2 are electrically coupled to thethrough-hole TH2 on the back surface of the through-hole wiring boardTHWB. These lands LND1 have thereon a solder ball SB1 and the lands LND2have thereon a solder ball SB2. More specifically, in the through-holewiring board THWB according to the second related technology, thethickness of the wiring board (in consideration of the wiring thicknessof the surface and the back surface) attributable to the core layer CRL(about 0.4 mm) is about 0.5 mm and a through-hole diameter is about 150μm.

In the present embodiment, as shown in FIG. 24, the lands LND1 formed inan area of the back surface of the through-hole wiring board THWBoverlapping with the chip mounting area in a plan view has an NSMDstructure. On the other hand, the lands LND2 formed in an outer area notoverlapping with the chip mounting area in a plan view have an SMDstructure. In NSMD, the lands LND1 are brought into contact with thesolder balls SB1 not only at the bottom surface but also at the sidesurface of the lands, making it possible to improve the bond strengthbetween the lands LND1 and the solder balls SB1. As a result, accordingto the present embodiment, even if a stress due to temperature cyclingis applied to the solder balls SB1 which have coupled the through-holewiring board THWB and a mounting substrate to each other, fracture andseparation of the solder balls 1 from the lands LND1 can be suppressedeffectively. In particular, since NSMD which provides great adhesionwith the solder balls SB1 is employed as the structure of the lands LND1in an area overlapping, in a plan view, with the chip mounting areawhere stress becomes large, fracture and separation of the solder ballsSB1 from the lands LND1 can be suppressed effectively. As a result, inthe present embodiment, a semiconductor device having improvedreliability can be provided.

MODIFICATION EXAMPLE 1

FIG. 25 is a plan view showing the configuration of a through-holewiring board THWB according to the present modification example 1. FIG.25 shows the back surface of the through-hole wiring board THWB. In thepresent modification example 1, as shown in FIG. 25, the number of thesolder balls SB1 placed in an inner area of the chip mounting area isgreater than that shown in FIG. 23. More specifically, in FIG. 23, thesolder balls SB1 formed in the inner area are placed in one row, whilein the present modification example 1 shown in FIG. 25, the solder ballsSB1 formed in the inner area are placed in two rows. Also in this case,all the lands having thereon the solder balls SB1 and placed in theinner area of the chip mounting area have an NSMD structure. This meansthat in FIG. 25, the lands having thereon the solder balls SB1 andplaced in an area of the back surface of the through-hole wiring boardTHWB overlapping with the chip mounting area in a plan view have an NSMDstructure. More specifically, in FIG. 25, the lands corresponding to thedotted solder balls SB1 have an NSMD structure. Thus, according to thepresent modification example 1, the lands placed in at least an area ofthe back surface of the through-hole wiring board THWB overlapping withthe chip mounting area in a plan view use NSMD as its configurationmode. In NSMD, the lands are brought into contact with the solder ballsSB1 not only at the bottom surface but also at the side surface of thelands so that the bond strength between the lands and the solder ballsSB1 can be improved.

MODIFICATION EXAMPLE 2

FIG. 26 is a plan view showing the configuration of a through-holewiring board THWB according to the present modification example 2. FIG.26 shows the back surface of the through-hole wiring board THWB. In thepresent modification example 2, as shown in FIG. 26, a semiconductorchip to be mounted on the through-hole wiring board THWB has anincreased size, which correspondingly increases the size of a chipmounting area. From the drawing, it is apparent that the broken linecorresponding to the end portion of the chip mounting area partiallyoverlaps with some of the solder balls SB2 placed in an outer area ofthe chip mounting area. Also in the present modification example 2having such a configuration, all the lands having thereon solder ballsSB1 placed in an inner area of the chip mounting area have an NSMDstructure. Moreover, in the present modification example 2, the landshaving thereon the solder balls SB2 which partially overlap with the endportion of the chip mounting area in a plan view have an NSMD structure,because in the present modification example 2, the solder balls SB2partially overlapping with the end portion of the chip mounting area ina plan view are presumed to be subjected to a greater stress. In short,in the present modification example 2, not only the lands having thereonthe solder balls SB1 placed in the inner area of the chip mounting areabut also the solder balls SB2 partially overlapping with the end portionof the chip mounting area in a plan view have an NSMD structure.

More specifically, in FIG. 26, the lands corresponding to the dottedsolder balls SB1 and the dotted solder balls SB2 have an NSMD structure.Thus, in the present modification example 2, the lands placed in atleast an area of the back surface of the through-hole wiring board THWBoverlapping with the chip mounting area in a plan view have an NSMDstructure. In NSMD, the lands are brought into contact with the solderballs SB1 or solder balls SB2 not only at the bottom surface but alsothe side surface of the lands so that the bond strength between thelands and the bolder balls SB1 or the lands and the solder balls SB2 canbe improved.

MODIFICATION EXAMPLE 3

FIG. 27 is a plan view showing the configuration of a through-holewiring board THWB according to the present modification example 3. FIG.27 shows the back surface of the through-hole wiring board THWB. In thepresent modification example 3 shown in FIG. 27, a semiconductor chip tobe mounted on the through-hole wiring board THWB has a larger size, bywhich the size of a chip mounting area becomes greater. From thisdrawing, it is apparent that the broken line corresponding to the endportion of the chip mounting area embraces some of the solder balls SB2placed in the outer area of the chip mounting area. Even in the presentmodification example 3 having such a configuration, all the landsmounting thereon the solder balls SB1 placed in the inner area of thechip mounting area have an NSMD structure. Moreover, in the presentmodification example 3, the lands mounting thereon the solder balls SB2overlapping with the chip mounting area in a plan view have also an NSMDstructure, because in the present modification Example 3, the solderballs SB2 overlapping with the chip mounting area in a plan view arepresumed to be subjected to a large stress. In short, in the presentmodification example 3, not only the lands on which the solder balls SB1placed in the inner area of the chip mounting area are to be mounted butalso the lands on which some of the solder balls SB2 overlapping withthe chip mounting area in a plan view are to be mounted have an NSMDstructure.

More specifically, FIG. 27 shows that the lands corresponding to thedotted solder balls SB1 and the dotted solder balls SB2 have an NSMDstructure. Thus, in the present modification example 3, the lands placedin at least an area of the back surface of the through-hole wiring boardTHWB overlapping with the chip mounting area in a plan view employs NSMDas a configuration mode. In NSMD, the lands are brought into contactwith the solder balls SB1 and solder balls SB2 not only at the bottomsurface but also the side surface of the lands and therefore, the bondstrength between the lands and the solder balls SB1 or the bond strengthbetween the lands and the solder ball SB2 can be improved.

MODIFICATION EXAMPLE 4

FIG. 28 is a plan view showing the configuration of a through-holewiring board THWB according to the present modification example 4. FIG.28 shows the back surface of the through-hole wiring board THWB. In thepresent modification example 4 shown in FIG. 28, the semiconductor chipto be mounted on the through-hole wiring board THWB has a greater size,by which the size of the chip mounting area becomes larger. From thedrawing, it is apparent that the broken line corresponding to the endportion of the chip mounting area embraces some of the solder balls SB2placed in an outer area of the chip mounting area. Even in the presentmodification example 4 having such a configuration, all the lands onwhich the solder balls SB1 placed in the inner area of the chip mountingarea are to be mounted have an NSMD structure. Moreover, in the presentmodification example 4, the lands on which the solder balls SB2overlapping with the chip mounting area in a plan view are to be mountedhave an NSMD structure, because in the present modification example 4,the solder balls SB2 overlapping with the chip mounting area in a planview are presumed to be subjected to large stress.

In the present modification example 4, also the lands on which thesolder balls SB2 closest to the end portion (broken line) of the chipmounting area, among the solder balls SB2 placed in an outer area of thechip mounting area, are to be mounted have an NSMD structure, because,among the solder balls SB1 and solder balls SB2 formed on the backsurface of the through-hole wiring board THWB, the solder ballssubjected to a greatest stress are solder balls placed in an areaoverlapping with the chip mounting area in a plan view. A great stressis presumed to be applied also to the solder balls closest to the chipmounting area even if they do not overlap with the chip mounting area ina plan view. In the present modification example 4, therefore, the landson which the solder balls SB2 closest to the end portion (broken line)of the chip mounting area, among the solder balls SB2 placed in theouter region of the chip mounting area, are to be mounted have also anNSMD structure. This makes it possible to provide a semiconductor devicehaving improved reliability.

The term “the closest” as used herein means that the solder balls areplaced at a position shortest from the end portion (broken line) of thechip mounting area and for example, this distance is shorter than thedistance between the solder balls SB2 adjacent to each other.

Thus, in the present modification example 4, not only the lands on whichthe solder balls SB1 placed in the inner area of the chip mounting areaare to be mounted but also the lands on which some of the solder ballsSB2 overlapping with the chip mounting area in a plan view are to bemounted have an NSMD structure. Moreover, the lands which are placed inthe outer area of the chip mounting area but placed at a positionclosest to the chip mounting area have also an NSMD structure.

More specifically, FIG. 28 shows that the lands corresponding to thedotted solder balls SB1 and the dotted solder balls SB2 have an NSMDstructure. Thus, according to the present modification example 4, notonly the lands placed in at least an area of the back surface of thethrough-hole wiring board THWB overlapping with the chip mounting areain a plan view but also the lands closest to the chip mounting employNSMD as their configuration mode. In NSMD, the lands are brought intocontact with the solder balls SB1 or the solder balls SB2 not only atthe bottom surface but also at the side surface of the lands andtherefore, the bond strength between the lands and the solder balls SB1or the lands and the solder balls SB2 can be improved.

MODIFICATION EXAMPLE 5

FIG. 29 is a plan view showing the configuration of a through-holewiring board THWB according to the present modification example 5. FIG.29 shows the back surface of the through-hole wiring board THWB. In FIG.29, a plurality of solder balls SB2 is placed in an outer area of therectangular through-hole wiring board THWB. A chip mounting area isformed so as to be embraced in the outer area having therein the solderballs SB. This chip mounting area has, in the inner area thereof, aplurality of solder balls SB1.

In FIG. 29, the present modification example 5 is characterized by thatthe lands having thereon the solder balls SB1 and the lands havingthereon the solder balls SB2 which are placed on the back surface of thethrough-hole wiring board THWB have an NSMD structure. In short, in FIG.29, all the lands placed on the back surface of the through-hole wiringboard THWB have an NSMD structure. More specifically, FIG. 29 shows thatthe lands corresponding to the dotted solder balls SB1 and the dottedsolder balls SB2 have an NSMD structure. Thus, according to the presentmodification example 5, all the lands placed on the back surface of thethrough-hole wiring board THWB employ NSMD as a configuration mode. InNSMD, therefore, the lands are brought into contact with the solderballs SB1 or solder balls SB2 not only at the bottom surface but also atthe side surface of the lands so that the bond strength between thelands and the solder balls SB1 or between the lands and the solder ballsSB2 can be improved.

It is possible to use NSMD for only the lands having thereon the solderballs placed in an area overlapping with the chip mounting area in aplan view because the greatest stress is put on the solder balls placedin an area overlapping with the chip mounting area in a plan view. Inother words, it seems unnecessary to use NSMD for the lands on whichsolder balls placed in an outer area not overlapping with the chipmounting area in a plan view are to be mounted.

In this case, the configuration mode of the lands is NSMD in the innerarea of the chip mounting area, while the configuration mode of thelands is SMD in the outer area of the chip mounting area. This meansthat lands of two configuration modes are present. If so, the followingproblem may presumably occur. Described specifically, when the solderballs mounted on the lands having an NSMD structure and the solder ballsmounted on the lands having an SMD structure are adjusted to have thesame size, solder flows along and brought into contact with not only thebottom surface but also the side surface of the lands. On the otherhand, when the lands have an SMD structure, solder is brought intocontact with only the bottom surface of them. As a result, in the landshaving an NSMD structure, due to the solder running along even the sidesurface of the lands, the height (finish height) of the solder ballsmounted on the lands having an NSMD structure may presumably becomelower than the height (finish height) of the solder balls mounted on thelands having an SMD structure. This means that the height of the solderballs formed on the back surface of the through-hole wiring board THWBvaries. This may lead to a coupling failure between the through-holewiring board THWB and the mounting substrate via these solder balls.

In the present modification example 5, on the other hand, all the landsformed on the back surface of the through-hole wiring board THWBuniformly have an NSMD structure so that variation in the height ofthese solder balls due to the presence of both NSMD and SMD does notoccur. The present modification example 5 therefore gives the advantageof improving the coupling reliability between the through-hole wiringboard THWB and the mounting substrate via solder balls. In particular,the present modification example 5 is markedly effective for reducingthe variation in the height of the solder balls mounted on the backsurface of the through-hole wiring board THWB while improving the bondstrength between the lands and balls placed in an area which overlapswith the chip mounting area in a plan view and tends to be subjected toa large stress.

Advantage of Embodiments

According to the present embodiment, NSMD is employed as theconfiguration mode of the lands placed in at least an area of the backsurface of the through-hole wiring board overlapping with the chipmounting area in a plan view. In NSMD, the lands are brought intocontact with the solder balls not only at the bottom surface but alsothe side surface of the lands so that bond strength between the landsand solder balls can be improved. As a result, the present embodimentmakes it possible to effectively suppress the fracture and separation ofthe solder balls from the lands, even if a stress due to temperaturecycling is put on the solder balls which couple the through-hole wiringboard to the mounting substrate. The semiconductor device according tothe present embodiment therefore has improved reliability.

More specifically, it has been confirmed that the life of thesemiconductor device of the present embodiment mounted on a mountingsubstrate becomes longer than the life of a semiconductor device, towhich the technical concept of the present embodiment has not beenapplied, mounted on a mounting substrate. For example, at a temperaturecycling test at −40° C. and at 125° C., when the semiconductor device,to which the technical concept of the present embodiment has not beenapplied, is mounted on a mounting substrate, fracture and separation ofa solder ball from a land occurred after 700 cycles. On the other hand,when the semiconductor device of the present embodiment is mounted on amounting substrate, fracture and separation of a solder ball from a landdid not occur even after 1000 cycles. The results have demonstrated thataccording to the present embodiment, a semiconductor device havingimproved reliability can be provided The usefulness of the technicalconcept of the present embodiment is therefore confirmed.

Manufacturing Method of Semiconductor Device According to Embodiment

The semiconductor device according to the present embodiment has theabove-mentioned configuration and a manufacturing method of it willhereinafter be described referring to some drawings.

As shown in FIG. 30, a through-hole wiring board THWB having bothsurfaces attached with a conductive film CF1 made of a copper foil isprovided. The through-hole wiring board THWB is made of a base material,for example, a glass BT material or a glass heat-resistant epoxymaterial. Then, as shown in FIG. 31, a through-hole TH1 and athrough-hole TH2 are formed in a through-hole formation area. Thethrough-hole TH1 and the through-hole TH2 are bored using a drill andthey are formed so as to penetrate through the through-hole wiring boardTHWB attached, on both surfaces thereof, with the conductive film CF1.

Next, as shown in FIG. 32, a conductive film CF2 made of a copperplating film is formed on both surfaces of the conductive film CF1attached to the through-hole wiring board THWB. The conductive film CF2made of a copper plating film can be formed, for example, by electrolessplating or electroplating. The conductive film CF2 made of this copperplating film is also formed on the side surface of the through-hole TH1and the side surface of the through-hole TH2, each through-holepenetrating through the through-hole wiring board THWB. It is to benoted that although the conductive film CF2 is formed also on theconductive film CF1 formed on both surfaces of the through-hole wiringboard THWB, the conductive film CF1 and the conductive film CF2 will bedescribed integrally as a conductive film CF1 in the drawings of FIG. 32and thereafter.

Next, as shown in FIG. 33, the conductive films CF1 formed on thesurface and back surface of the through-hole wiring board THWB arepatterned successively by using photolithography and etching.

Next, as shown in FIG. 34, a solder resist SR is applied onto bothsurfaces of the through-hole wiring board THWB. In order to apply thesolder resist SR to the both surfaces of the through-hole wiring boardTHWB, first, the solder resist SR is applied to one of the surfaces ofthe through-hole wiring board THWB, followed by interim drying. Aftercompletion of the interim drying of the solder resist SR, the solderresist SR is applied onto the other surface of the through-hole wiringboard THWB, followed by interim drying. The solder resist SR cantherefore be formed on both surfaces of the through-hole wiring boardTHWB. As a result, on the surface (upper surface) and the back surface(lower surface) of the through-hole wiring board THWB, the patternedconductive film CF1 is covered with the solder resist SR.

Next, as shown in FIG. 35, an opening portion OP2 is formed in thesolder resist SR by using photolithography. This means that the openingportion OP2 is formed in the back surface (lower surface) of thethrough-hole wiring board THWB. This opening portion OP2 is formed so asto expose a land LND1 formed on the back surface (lower surface) of thethrough-hole wiring board THWB. More specifically, the opening portionOP2 is formed so that it has a diameter greater than that of the landLND1 and at the same time, the opening portion OP2 is formed so as toembrace therein the land LND1 in a plan view. This makes it possible toemploy NSMD as a configuration mode of the land LND1 formed on the backsurface (lower surface) of the through-hole wiring board THWB. Aftermain curing (main drying) of the solder resist SR, a nickel/gold platingfilm is formed on the land LND1 exposed from the opening portion OP2. Insuch a manner, terminals plated with a nickel/gold film can be formed onthe land LND1. Then, the resulting through-hole wiring board THWB iswashed, followed by visual inspection to complete the through-holewiring board THWB. In such a manner, the through-hole wiring board THWBaccording to the present embodiment can be manufactured.

Next, as shown in FIG. 36, the through-hole wiring board THWBmanufactured by the above-mentioned manufacturing steps is provided.This through-hole wiring board THWB has a layout configuration, forexample, as shown in FIG. 7 and has terminals TE1 and TE2, through-holesTH1, TH2, and TH3, and the like.

As shown in FIG. 37, an underfill UF is applied to a chip mounting areaon the surface of the through-hole wiring board THWB. As the under fillUF, a quick-curing resin NCP (Non-Conductive Paste) is recommended.

Then, as shown in FIG. 38, a semiconductor chip CHP2 is mounted on thethrough-hole wiring board THWB. This semiconductor chip CHP2 has, on thesurface (main surface) thereof, a pillared bump electrode PLBMP1 and apillared bump electrode PLBMP2, for example, as shown in FIG. 4. Thesemiconductor chip CHP2 is then mounted on the through-hole wiring boardTHWB so that the pillared bump electrode PLBMP1 (PLBMP2) formed on thesemiconductor chip CHP2 is brought into direct contact with the terminal(not shown) formed on the through-hole wiring board THWB, followed byheating to a high temperature. As a result, the solder of the pillaredbump electrode PLBMP1 (PLBMP2) is melted to electrically couple theterminal TE1 (TE2) on the through-hole wiring board THWB to the copperof the pillared bump electrode PLBMP1 (PLBMP2). At this time, theunderfill UF spreads in a wet state and fills the space between thesemiconductor chip CHP2 and the through-hole wiring board THWB. Inaddition, a quick curing resin NCP is used as the underfill UF so thatthe underfill UF is cured.

In the present embodiment, the pillared bump electrode PLBMP1 (PLBMP2)whose height can be secured even if its size is reduced is used forcoupling the semiconductor chip CHP2 to the through-hole wiring boardTHWB so that the spreading of the underfill UF in a wet state is notinhibited.

Next, as shown in FIG. 39, solder balls SB are mounted on the backsurface (surface on the side opposite to the chip mounting surface) ofthe through-hole wiring board THWB. In particular, in the presentembodiment, solder balls SB2 are mounted in an outer area of the chipmounting area and solder balls SB1 are mounted in an inner area of thechip mounting area. More specifically, the solder balls SB1 and thesolder balls SB2 are mounted on lands formed on the through-hole wiringboard THWB. In the present embodiment, the lands formed in at least anarea overlapping with the chip mounting area in a plan view have an NSMDstructure so that the bond strength between the lands and the solderball SB1 can be improved in this area. In the above-mentioned manner,the semiconductor device of the present embodiment can be manufactured.

Then, the semiconductor device of the present embodiment is mounted on amounting substrate via the solder balls SB1 and solder balls SB2. Withthe semiconductor device mounted on the mounting substrate, atemperature cycling test after mounting is performed. In thisreliability test (temperature cycling test after mounting), the solderballs SB1 placed in an area overlapping with the chip mounting area in aplan view tend to cause fracture and separation from the lands due to adifference in thermal expansion coefficient between the semiconductorchip CHP2 and the through-hole wiring board THWB. In the presentembodiment, however, NSMD is used as a configuration mode of the landsplaced in at least an area overlapping with the chip mounting area in aplan view.

According to the present embodiment, the lands are brought into contactwith the solder balls not only at the bottom surface but also the sidesurface of the lands so that the bond strength between the lands and thesolder balls can be improved. As a result, according to the presentembodiment, fracture and separation of the solder balls from the landscan effectively be suppressed even if a stress due to temperaturecycling is applied to the solder balls with for coupling thethrough-hole wiring board to the mounting substrate. According to thepresent embodiment, a semiconductor device having improved reliabilitycan be provided.

The invention made by the present inventors has so far been describedspecifically based on its embodiment. It should however be borne in mindthat the invention is not limited to or by the embodiment. Needless tosay, it can be changed without departing from the gist of the invention.

What is claimed is:
 1. A method of manufacturing a semiconductor devicecomprising: (a) preparing a semiconductor chip having a main surfaceover which a plurality of protruding electrodes and a wiring boardhaving a first main surface over which a plurality of terminals areformed and a second main surface over which a plurality of lands areformed opposite the first main surface; (b) disposing a sealing resinover the first main surface of the wiring board; and (c) after the step(b), mounting the semiconductor chip over the first main surface of thewiring board via the sealing resin such that the main surface of thesemiconductor chip faces to the first main surface of the wiring boardand electrically connecting the protruding electrodes of thesemiconductor chip to the terminals of the wiring board, respectively,wherein the wiring board comprises: (a1) an insulating film formed overthe second main surface; (a2) among the terminals, a plurality of firstterminals and a plurality of second terminals placed in a first area ofthe wiring board; (a3) a plurality of first through-holes placed in asecond area inside the first area and electrically coupled to the firstterminals, respectively; (a4) among the lands, a plurality of firstlands electrically coupled to the first through-holes, respectively, andplaced so as to overlap with the second area in plan view; (a5) aplurality of second through-holes placed in a third area outside thefirst area and electrically coupled to the second terminals,respectively; and (a6) among the lands, a plurality of second landselectrically coupled to the second through-holes, respectively, andplaced so as to overlap with the third area in plan view, wherein theinsulating film has therein a plurality of openings, wherein the firstlands are placed so as to overlap with the semiconductor chip in planview, and wherein the first lands are embraced in the openings,respectively.
 2. The method according to claim 1, wherein, in the step(c), the sealing resin is cured between the main surface of thesemiconductor chip and the first surface of the wiring board by heating.3. The method according to claim 2, wherein, in the step (c), each ofthe protruding electrodes of the semiconductor chip are electricallyconnected to each of the terminals of the wiring board by melting asolder between each of the protruding electrodes and the terminals. 4.The method according to claim 3, wherein each of the protrudingelectrodes is a copper pillared bump electrode.
 5. The method, furthercomprising: (d) after the step (c), disposing a plurality of solderballs on the lands of the wiring board and electrically connecting thesolder balls to the lands, respectively.